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MX - 3600 / CXI3600M X / Specification confidential 17 / 39 spec_mx3600_sys_10.11.doc Table 5: MX - 3600 / Key-spe cification items / X- Y table: Parameter X-Axis Y-Axis Comment Drive Sy st em prec. Servo – spindle drive…
MX-3600 / CXI3600MX / Specification
confidential 16/39 spec_mx3600_sys_10.11.doc
2.3.2. Sample Table
The sample x-y table is designed for high speed positioning to meet the
inspection goal of 3 images/s.
The new precise spindle servo drives together with the digital servo amplifiers
providing the capability for faster ramps and positioning during the FOV
positioning.
Fig.9: XMX-3600 / x-y table with new servo motor drives and digital amplifiers
MX-3600 / CXI3600MX / Specification
confidential 17/39 spec_mx3600_sys_10.11.doc
Table 5: MX-3600 / Key-specification items / X-Y table:
Parameter
X-Axis
Y-Axis
Comment
Drive System
prec. Servo –
spindle drive
prec. Servo-
spindle drives
Controller
digital servo
digital servo
amplifiers
Interface
CAN
CAN
Driving Distance
500mm
(20’’)
350mm
(14’’)
Velocity (max)
Up to 500mm/s
Up to 500mm/s
Position Accuracy
Up to 25 µm
Up to 25 µm
Position Repeatability
+/- 25 µm
+/- 25 µm
Total Accuracy
+/- 50 µm
+/- 50 µm
( 20 mm FOV)
Typ. FOV Positioning
Time
<200ms
<200ms
typ. FOV = 25mm
(1inch)
Max. Sample Load
up to 2,5 kg
up to 2,5kg
Board Clamping
side-clamp
side-clamp
pneumatic
Max. Board Thickness
up to 4mm
up to 4mm
Operating Temperature
15-35 dgr C
15-35 dgr C
MX-3600 / CXI3600MX / Specification
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2.3.3. Z - Axis
The z-drive is hosted together with the X-ray tube in the extra shielded x-ray
tube chamber.
The z-axis is exactly vertically configured against the x-y base and equipped
with a programmable servo motor to provide a continuously changeable field
of view.
z-axis directions 0…165mm/6.5’’ drive distance/cont.
Fig.10: z-axis with x-ray tube motion