AppX.A_spec_mx3600_sys_10.11.pdf - 第16页
MX - 3600 / CXI3600M X / Specification confidential 16 / 39 spec_mx3600_sys_10.11.doc 2.3.2. Sample Table The sample x -y table is designed for high sp eed posit ioning to meet the inspection goal of 3 images/s . The new…
MX-3600 / CXI3600MX / Specification
confidential 15/39 spec_mx3600_sys_10.11.doc
Key-Features of the MX-3600 load/unload and handling system:
Load/unload board buffering in input and output conveyor
No-shutter times because of long external conveyor
Beam-On/Off cycle generates zero ramping time loss
Table 4: Load/Unload Handling Parameter
Parameter
Input-Section
Output-Section
Total
Load-Unload Time
<4s
<4s
< 8s
Top Clearance (incl.
Board thickness)
Optional:
up to 12,5 mm
15 mm
up to 12,5mm
15mm
up to 12,5mm
15mm
Bottom Clearance
up to 37,5mm
up to 37,5mm
up to 37,5mm
MX-3600 / CXI3600MX / Specification
confidential 16/39 spec_mx3600_sys_10.11.doc
2.3.2. Sample Table
The sample x-y table is designed for high speed positioning to meet the
inspection goal of 3 images/s.
The new precise spindle servo drives together with the digital servo amplifiers
providing the capability for faster ramps and positioning during the FOV
positioning.
Fig.9: XMX-3600 / x-y table with new servo motor drives and digital amplifiers
MX-3600 / CXI3600MX / Specification
confidential 17/39 spec_mx3600_sys_10.11.doc
Table 5: MX-3600 / Key-specification items / X-Y table:
Parameter
X-Axis
Y-Axis
Comment
Drive System
prec. Servo –
spindle drive
prec. Servo-
spindle drives
Controller
digital servo
digital servo
amplifiers
Interface
CAN
CAN
Driving Distance
500mm
(20’’)
350mm
(14’’)
Velocity (max)
Up to 500mm/s
Up to 500mm/s
Position Accuracy
Up to 25 µm
Up to 25 µm
Position Repeatability
+/- 25 µm
+/- 25 µm
Total Accuracy
+/- 50 µm
+/- 50 µm
( 20 mm FOV)
Typ. FOV Positioning
Time
<200ms
<200ms
typ. FOV = 25mm
(1inch)
Max. Sample Load
up to 2,5 kg
up to 2,5kg
Board Clamping
side-clamp
side-clamp
pneumatic
Max. Board Thickness
up to 4mm
up to 4mm
Operating Temperature
15-35 dgr C
15-35 dgr C