M1serviceManual_j.pdf - 第8页
制御基板 ........................................................... ............................................................... ...... ４-４ 制御基板の取扱い ....................................................... ...............…
目次
１ 据付 １-１
マウンタの据付.....................................................................................................................１-２
設置条件...........................................................................................................................１-２
生産ライン出し................................................................................................................１-３
据付 ....................................................................................................................................１-４
マウンタとローダの連結....................................................................................................１-６
マウンタの前後工程...........................................................................................................１-７
前後工程の接続 ............................................................................................................１-７
搬入シーケンス（標準仕様） ......................................................................................１-８
搬出シーケンス（標準仕様） ......................................................................................１-９
搬入シーケンス（ＳＭＥＭＡ規格対応仕様） ......................................................１-１０
搬出シーケンス（ＳＭＥＭＡ規格対応仕様） ......................................................１-１１
２ 点検 ２-１
毎日の点検............................................................................................................................２-２
目視点検...........................................................................................................................２-２
手動動作による点検 ....................................................................................................２-４
月ごとの点検 ........................................................................................................................２-５
３ 機械部 ３-１
ヘッド ........................................................................................................................................３-２
ノズル.......................................................................................................................................３-３
ID シール ................................................................................................................................３-５
ノズル ID シールの貼り方...........................................................................................３-５
シールの清掃..................................................................................................................３-６
カメラ ........................................................................................................................................３-７
レンズフィルタの清掃 ...................................................................................................３-７
スキャンカメラの清掃 ...................................................................................................３-７
注油..........................................................................................................................................３-８
注油箇所...........................................................................................................................３-８
指定潤滑油...................................................................................................................３-１５
４ 電気部 ４-１
フロッピーディスクとディスクドライブ ............................................................................４-２
フロッピーディスクの取扱い.......................................................................................４-２
フロッピーディスクドライブのクリーニング ............................................................４-３
制御基板 ................................................................................................................................４-４
制御基板の取扱い........................................................................................................４-４
フィーダ／フィーダバンクの電極部...............................................................................４-５
１．据付 １-１
１ 据付