3OM-1064-001.pdf - 第35页

5. Cancellation of P .E.C. Recognition Error When the [RESET] button is pressed after a P .E.C. recognition error has oc- curred during automatic operation, the “MANUAL ALIGNMENT” display (Fig. 1.4 or 1.5) appears on the…

Remedy

(1) Press the [RESET] button to cancel the error condition.

(2) Press the [READY] button to unlock the supply cover.

(3) Open the safety bar and the supply and maintenance covers. Then, push

Beams A and B by hand to separate them.

(4) Close the maintenance and supply covers and the safety bar.

(5) When an error occurs, check the contents of the error and remove the

cause.

(6) Press the [POWER ON] button for approx. 2 seconds to supply power to

the loads.

(7) Press the [RESET] button to cancel the error condition.

The system clear operation is executed.

(8) Press the [READY] button to lock the supply cover.

(9) Press the [ZERO] button to zero each device.

After all devices are zeroed completely, open the “AUTO OPN SUB-

MENU” display and perform the semi-automatic operation to re-start the

operation. (Hierarchical Sequence: “AUTO OPN MODE (PLACE-

MENT)” Display → “AUTO OPN SUB-MENU” Display)

0005-002 1-26 Tg0248-PM-ER

4. Cause and Remedy of Beam Abnormal Approach Detection

5. Cancellation of P.E.C. Recognition Error

When the [RESET] button is pressed after a P.E.C. recognition error has oc-

curred during automatic operation, the “MANUAL ALIGNMENT” display

(Fig. 1.4 or 1.5) appears on the screen.

The display on the screen and the operation procedures differ according to the

mode set at “P.E.C. MANUAL ALIGNMENT MODE”. (Hierarchical Se-

quence: “AUTO OPN MODE (PLACEMENT)” Display → “AUTO OPN SUB-

MENU” Display → “OPERATION MODE” Display → “P.E.C. MANUAL

ALIGNMENT MODE” Display)

P.E.C. Manual Alignment Mode: STANDARD

Fig. 1.4

An image of the captured fiducial mark appears in the crossline section and a

template (identical to the fiducial mark in shape and size) at the center of the

crosslines on the recognition monitor.

(See Fig. 1.5.)

Fig. 1.5

The X/Y beam must be moved until the image of the actual fiducial mark and

the template overlap each other at the center of the crosslines. (Manual Align-

ment)

Actual Fiducial Mark

Template

Crossline

0005-002 1-27 Tg0248-PM-ER

5. Cancellation of P.E.C. Recognition Error

Operation Procedure

(1) Select one of the “DIRECTION” keys ([ ], [ ], [ ], and [ ]) to determine

the direction in which the X/Y beam is moved to the position where the

actual fiducial mark can be located at the center of the crosslines. Then,

select one of the “SPEED” keys ([HIGH], [LOW], and [1 PULSE]) and

press the [MOVE] button.

When the [HIGH] or the [LOW] key is selected, the X/Y beam keeps on

moving at the selected speed as long as the [MOVE] button is kept pressed.

Every time the [1 PULSE] key is pressed, the X/Y beam moves in the

increments of 1 pulse.

(2) While changing the direction and speed, move the XY beam until the im-

age of the actual fiducial mark and the template overlap each other at the

center of the crosslines as shown in Fig. 1.6.

Note: Perform the manual alignment operation perfectly with the [1

PULSE] key (one of the “SPEED” keys). Otherwise, components

may not be placed accurately.

Fig. 1.6

(3) After the completion of the manual alignment operation, press the [END]

key.

The “AUTO OPN MODE (PLACEMENT)” display appears on the screen.

(4) When the [START] button is pressed, the automatic operation re-starts.

Note: Pressing the [END] key is validated only once after manual alignment

operation is completed.

• Exiting from Manual Alignment Operation by Mistake

If the [END] key is pressed by mistake, a placement position error occurs.

When placement position deviates from the correct one, follow the reme-

dial operation described below.

Operation Procedure

(1) Press the [SYS CLR] button to interrupt automatic operation.

(2) Perform zeroing operation.

(3) Open the “AUTO OPN SUB-MENU” display and perform the semi-au-

tomatic operation to re-start the operation. (Hierarchical Sequence: “AUTO

OPN MODE (PLACEMENT)” Display → “AUTO OPN SUB-MENU”

Display)

0005-002 1-28 Tg0248-PM-ER

5. Cancellation of P.E.C. Recognition Error