3OM-1064-001.pdf - 第37页
P .E.C. Manual Alignment Mode: TRACKBALL Fig. 1.7 A template (identical to the fiducial mark in shape and size) appears at the center of the crosslines on the recognition monitor . (See Fig. 1.8.) Fig. 4.8 Fig. 1.8 The c…
Operation Procedure
(1) Select one of the “DIRECTION” keys ([ ], [ ], [ ], and [ ]) to determine
the direction in which the X/Y beam is moved to the position where the
actual fiducial mark can be located at the center of the crosslines. Then,
select one of the “SPEED” keys ([HIGH], [LOW], and [1 PULSE]) and
press the [MOVE] button.
When the [HIGH] or the [LOW] key is selected, the X/Y beam keeps on
moving at the selected speed as long as the [MOVE] button is kept pressed.
Every time the [1 PULSE] key is pressed, the X/Y beam moves in the
increments of 1 pulse.
(2) While changing the direction and speed, move the XY beam until the im-
age of the actual fiducial mark and the template overlap each other at the
center of the crosslines as shown in Fig. 1.6.
Note: Perform the manual alignment operation perfectly with the [1
PULSE] key (one of the “SPEED” keys). Otherwise, components
may not be placed accurately.
Fig. 1.6
(3) After the completion of the manual alignment operation, press the [END]
key.
The “AUTO OPN MODE (PLACEMENT)” display appears on the screen.
(4) When the [START] button is pressed, the automatic operation re-starts.
Note: Pressing the [END] key is validated only once after manual alignment
operation is completed.
• Exiting from Manual Alignment Operation by Mistake
If the [END] key is pressed by mistake, a placement position error occurs.
When placement position deviates from the correct one, follow the reme-
dial operation described below.
Operation Procedure
(1) Press the [SYS CLR] button to interrupt automatic operation.
(2) Perform zeroing operation.
(3) Open the “AUTO OPN SUB-MENU” display and perform the semi-au-
tomatic operation to re-start the operation. (Hierarchical Sequence: “AUTO
OPN MODE (PLACEMENT)” Display → “AUTO OPN SUB-MENU”
Display)
0005-002 1-28 Tg0248-PM-ER
5. Cancellation of P.E.C. Recognition Error
P.E.C. Manual Alignment Mode: TRACKBALL
Fig. 1.7
A template (identical to the fiducial mark in shape and size) appears at the
center of the crosslines on the recognition monitor.
(See Fig. 1.8.)
Fig. 4.8
Fig. 1.8
The center of the crosslines must be moved using the trackball until the image
of the actual fiducial mark and the template overlap each other.
(Manual Alignment)
Actual Fiducial Mark
Template
Crossline
0005-002 1-29 Tg0248-PM-ER
5. Cancellation of P.E.C. Recognition Error
Operation Procedure
(1) Manipulate the trackball until the center of the crosslines comes over to
the image of the actual fiducial mark.
The image can be enlarged by pressing the right button of the trackball.
Pressing the left button reduces the image.
(2) Manipulate the trackball to enlarge or reduce the image until the template
at the center of the crosslines and the image of the actual fiducial mark
overlap each other as shown in Fig. 1.9.
Note: Enlarge the view for accurate manual alignment operation. Oth-
erwise, components may not be placed accurately.
Fig. 1.9
(5) After the completion of the manual alignment operation, press both left
and right buttons of the trackball at the same time.
The “AUTO OPN MODE (PLACEMENT)” display appears on the screen.
(6) When the [START] button is pressed, the automatic operation re-starts.
Note: Pressing both left and right buttons at the same time is validated
only once after manual alignment operation is completed.
• Exiting from Manual Alignment Operation by Mistake
If the [END] key is pressed by mistake, a placement position error occurs.
When placement position deviates from the correct one, follow the remedial
operation described below.
Operation Procedure
(1) Press the [SYS CLR] button to interrupt automatic operation.
(2) Perform zeroing operation.
(3) Open the “AUTO OPN SUB-MENU” display and perform the semi-
automatic operation to re-start the operation. (Hierarchical Sequence:
“AUTO OPN MODE (PLACEMENT)” Display → “AUTO OPN SUB-
MENU” Display).
0005-002 1-30 Tg0248-PM-ER
5. Cancellation of P.E.C. Recognition Error