4OM-1075-002.pdf - 第38页

Fig. 4A29 1.3 Maintenance Spots 0206-003 1-24 AHB01ETRP

(10) X/Y Beam Section

Fig. 4A28

1.3 Maintenance Spots

0206-003 1-23 AHB01ETRP

Fig. 4A29

1.3 Maintenance Spots

0206-003 1-24 AHB01ETRP

X/Y Linear Scale (X Axis) 1M7

Every Month Cleaning

Wipe the scale with a dry rag.

Fig. 4A30

Fig. 4A31

1.3 Maintenance Spots

0206-002 1-25 AHB01ETRP