4OM-1075-002.pdf - 第42页
Fig. 4A35 1.3 Maintenance Spots 0206-002 1-28 AHB01ETRP
(11) Conveyor Section
Fig. 4A34
1.3 Maintenance Spots
0206-002 1-27 AHB01ETRP
Fig. 4A35
1.3 Maintenance Spots
0206-002 1-28 AHB01ETRP
(12) Nozzle Stocker Section
Fig. 4A36
Fig. 4A37
1.3 Maintenance Spots
0206-003 1-29 AHB01ETRP