4OM-1075-002.pdf - 第44页

(13) Control Box Section Fig. 4A38 1.3 Maintenance Spots 0206-003 1-30 AHB01ETRP

(12) Nozzle Stocker Section

Fig. 4A36

Fig. 4A37

1.3 Maintenance Spots

0206-003 1-29 AHB01ETRP

(13) Control Box Section

Fig. 4A38

1.3 Maintenance Spots

0206-003 1-30 AHB01ETRP

(14) Frame

Fig. 4A39

1.3 Maintenance Spots

0206-003 1-31 AHB01ETRP