SussPA300UserGuide.pdf - 第10页
SUSS / PA300 / User Manual / M10-121841-00 / February 2002 9 2.6 Thermal Precautions The prober may optionally be equipped with a thermal chuck. These chucks operate at very low and high temperatures that will burn the u…
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SUSS / PA300 / User Manual / M10-121841-00 / February 2002
2.2 General Requirements
Safety related checks should be performed to supplier specification prior to system
acceptance (please refer to the installation checklist in the appendix). These safety
checks which are carried out at installation should be accepted by both the supplier
and the customer.
The installation site acceptance test should be signed by the supplier and the customer.
The following test should be performed prior to acceptance in order to verify that the
system meets certain requirements:
§ Statement of Conformance to SEMI S2
§ Safety interlocks function and shut down correct hazards
§ Ability to lock out hazardous energy sources prior to maintenance
§ Site-specific installation does not degrade tool’s ergonomic design factors (please
refer to the Ergonomic Information Table in the appendix)
§ Interface to building systems function as intended
§ Radio frequencies, electrostatic discharge and non-ionizing radiation
2.3 Electrical Precautions
The prober electronics rack contains electrical circuits with lethal voltage and current
levels. Do not open or remove covers during operation. Service of the electrical system
should be performed only by qualified personnel and only after pulling the mains cable
from the socket.
When probing high voltage devices, lethal high voltages may be present at the probe
tips, probe head connections, and on non-shielded or non-isolated probe arms. It is
therefore essential that the user avoid coming in contact with these system components
during test.
2.4 Moving Parts
SUSS has taken precautions to protect the operator by enclosing all moving parts as
much as possible without impeding the operation of or access to the prober. The
operator should not reach into the prober during operation and take care to keep
loose clothing or long hair from getting caught in the system. Use the system with
open or removed safety cover. The Interlock stops the mechanical stage moving while
the loading lid is open. Use this lid to load and unload wafers and substrates when the
chuck is in the loading position. Do not remove or change any safety signs.
2.5 Laser Precautions
The prober may optionally be equipped with a laser cutter. Avoid eye and skin exposure
to direct or scattered radiation. The accompanying manual should be read thoroughly
before the laser cutter is used and safety instructions should be taken into consideration.
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
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2.6 Thermal Precautions
The prober may optionally be equipped with a thermal chuck. These chucks operate at
very low and high temperatures that will burn the user upon contact. Avoid touching
during operation. The use of vacuum forceps is recommended. The accompanying
manual should be read thoroughly before the thermal chuck is used and safety
instructions should be taken into consideration.
2.7 Risk Valuation
The following risks correspond to KSD risk valuation categories.
Reaching in during normal operation is not necessary.
Reaching in with a bare hand in the case of a default without stopping the system does
not produce any immediate danger the moving parts are restricted and therefore unable
to squash anything inside.
The movement of energy chains is relatively slow. As the chain links can turn off,
reaching into the rear side of the energy chains does not produce any particular danger.
In the interest of positional accuracy, touching the energy chains during operation
should be avoided.
2.8 User Information
It should be noted that the position of the system is important where safety is concerned.
If SUSS recommendations are considered and followed injury risks can be kept minimal.
No supervision of chemicals etc. is required. But better safety for the energy chains
can be reached by using a SUSS cover which can be ordered along with the system.
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SUSS / PA300 / User Manual / M10-121841-00 / February 2002
2.9 Ergonomic Information
Note The user should take into consideration the ergonomic conditions
according to the demands of SEMI and should refer to the ergonomic
information table in the appendix. It is the responsibility of the customer
to ensure that these requirements are met.
Transient overvoltage as per overvoltage category II
Vacuum supply should be less than 200 mbar absolute – less than 0.8 bar gauge.
Air – Pressure supply: Filtered, dry and oil free air of at least 4 bar.
Maximum pressure is 10 bar.
Pollution Degree: Grade 1 as per IEC 664
Usage Position: Probe Station – horizontal.
Electronics Prober Bench – horizontal.
2.9.1 Clearances
Clearance suggestions and measurements for fingers, hands, arms, legs and the whole
body are given in the appendix (Ergonomic Information Table). SEMI has provided
these guidelines in order to make access and maintenance easier, thus creating a
safer working environment.
2.9.2 Display Units
Suggestions and measurements for the display units and installation variants are given
in the appendix (Ergonomic Information Table). SEMI has provided these guidelines
in order to make access and maintenance easier, thus creating a safer working
environment.
2.10 Connections
Functional Ground Terminals: (see photo overleaf)
Functional Ground Terminal for grounding conductor from Electronics Rack
1 free terminal for functional contact
4 free earth terminals to ground the 4 probeheads
1 free terminal connecting to the platen functional contact
2 connections for functional contact