SussPA300UserGuide.pdf - 第47页
46 SUSS / PA300 / User Manual / M10-121841-00 / February 2002 Utilities Vacuum Less than 200 mbar absolute , flow rate insignificant. Compressed Air 0.4 MPa to 1 MPa or 4 bar to 10 bar, flow rate insignificant. Vacuum/Ai…
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
45
Microscope Stage
Manual
X-Y Movement Range 50 mm
Drive Type coaxial knobs
Setup/Maintenance Lift manual, tilt-back
Adjustable
X-Y Movement Range 50 mm
Drive Type Clamping
Platen
Manual
Separation Stroke 400 µm
Coarse Adjustment Range 35 mm
Drive Type Compound knob
Fixed Probehead Mounting Vacuum, magnetic and high frequency bolt-
down and kinematic clamping.
Probecard Mounting Accepts standard SUSS probecard holder
for 4.5“ and 6“ probecards.
Lubrication
Microscope stage spindles Grease once every year
Microscope stage bearing rails Grease once every year
Chuck X-Y stage drive spindles Grease once every 12 weeks
Chuck Z-axis spindle Oil once every 12 weeks
Chuck Z-axis bearing rails Oil once every 1 year
Software
PC Minimum Requirement Please contact SUSS for more information
Operating System Windows NT4.0 & 2000 Professional
Control Software SUSS ProberBench
®
5
Interfaces
RS232 Electronics Standard
IEEE488 Electronics Optional
IEEE488 PC Optional
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SUSS / PA300 / User Manual / M10-121841-00 / February 2002
Utilities
Vacuum Less than 200 mbar absolute , flow rate
insignificant.
Compressed Air 0.4 MPa to 1 MPa or 4 bar to 10 bar, flow
rate insignificant.
Vacuum/Air Inputs US: 1/4“, all other: 6 mm.
Ergonomic Information
Probe station Horizontal usage position
Electronics ProberBench Horizontal usage position
Dimensions (W x D x H)
Mechanic (Table device): H = min. 950 mm x 900 mm x 770 mm with
microscope in raised position. Cameras or
laser cutters will require additional
clearance.
Mechanic (Standard device):
H = min. 950 mm x 900 mm x 1430 mm (see above)
Electronics 520 mm x 600 mm x 160 mm
with connectors installed.
Joystick Controller 260 mm x 260 mm x 120 mm
with connector installed.
Packaging
System box Length: 1230 mm
Width: 1200 mm
Height: 1120 mm
Net weight: 498 kg
Gross weight: 607 kg
System table with palette Length: 1050 mm
Width: 1000 mm
Height: 850 mm
Net Weight: 97 kg
Gross weight: 102 kg
Accessories Length: 800 mm
Width: 1200 mm
Height: 800 mm
Gross weight: approx. 80 kg
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
47
Weight
Device without table 500 kg
Device with table 600 kg
Electronics 13 kg
Temperature
Optimal operating range 19°C ... 24°C
Target temperature 22°C
Tolerance 1K
Max. rate of change/hour Not specified
Electronics ProberBench Side ventilators and air expellers must be
kept clear for air circulation at all times.
Humidity
Tool area 40 % ... 60 %
Support equipment area 40 % ... 60 %
Noise
Audio Noise Constant level: 56 dB (A) Impulse: 72 dB (A)
Pollution Level 1 IEC 664
Clean Room Class Class 6 corresponding to
DIN EN ISO 14664-1
Electrical Data
Power 230 V, 50 Hz, 510 VA or 120 V, 60 Hz,
510 VA (according to type)
Protection Class I
Transient overvoltage Overvoltage category II
Fuses
Main Power – external 2 x 2 A sluggish (230 V) or 2 x 4 A sluggish
(120 V) 1/4” x 1 1/4” Spiral type
EMO Main Power Supply (internal) 1x 500 mA sluggish (F1)
1x 125 mA sluggish (F2)
Size 5 mm x 20 mm
Power Supply Probe System 28 V d.c. 5 V d.c.
Power Supply EMO System 24 V a.c.