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SUSS / PA300 / User Manual / M10-121841-00 / February 2002 43 10 Appendix 10.1 Equipment Data Base Units Item International Units American Units Formula Physical Properties Distance mm in. 1 mm = 0.03937 in. Weight kg lb…

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

9 Troubleshooting

Each section starts with the problem or fault that is occurring. Work through the list of

possible causes and solutions until the problem is corrected. If the problem is not

resolved with this information contact SUSS Customer Service. In principle, Repairs

can only be carried out by SUSS Personnel. Contact details are in the front of this

manual or listed in the ProberBench User Interface under “Help and Contacting

Customer Service”.

9.1 System Does Not Power-Up

Check that:

1. Power, at the specified voltage and VA or watts, is supplied to the system.

2. Main Power Switch is on and the Indicator Lamp is lit.

3. On button has been pressed and its green lamp is illuminated.

4. Latching EMO Off button is in released position.

5. Electronics Rack main fuses are good. EMO power fuses are good (internal fuses)

9.2 Mechanics Do Not Respond to the Joystick Controller

Check that:

1. Mechanic responds to the User Interface.

2. The three LED function displays are on.

3. Controller is plugged into the Electronics Rack.

4. Loading lid is closed

9.3 Mechanics Do Not Respond to the User Interface (PC)

Check that:

1. Mechanic responds to the Joystick Controller.

2. User Interface is in demo mode.

3. Communications Error reported by a Dialog Box.

9.4 Stages Do Not Position Correctly

Check that:

1. Stage centers correctly.

2. Run Prober Initialization Program.

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

10 Appendix

10.1 Equipment Data Base Units

Item

International

Units

American

Units

Formula

Physical Properties

Distance mm in. 1 mm = 0.03937 in.

Weight kg lb. (av) 1 kg = 2.2046 lb. (av)

Temperature °C °F (1.8 x °C) + 32 = °F

Heat watts Btu/Hr 1 W = 3.41221 Btu/Hr

Exhaust

Size mm in. 1 mm = 0.03937 in.

Pressure Pa in. of H

O 1 Pa = 0.0040146 in. of H

Flow m

/h CFM 1 m

/h = 0.5833 CFM

Fitting Size mm in. (nominal) 1 mm = 0.03937 in.

Liquid

Pressure kPa psig 1 kPa = 0.1450 psig

Temperature °C °F (1.8 x °C) + 32 = °F

Flow LPM GPM 1 LPM = 0.2641 GPM

Fitting Size mm (nominal) in. (nominal) 1 mm = 0.03937 in.

Vacuum

Size mm (nominal) in. (nominal) 1 mm = 0.03937 in.

Pressure Pa in. Hg 1 Pa = 0.0002952 in. Hg

Flow SLPM SCFM 1 SLPM = 0.035 SCFM

Fitting Size mm (nominal) in. (nominal) 1 mm = 0.03937 in.

Pressure mbar in. Hg 1 mbar = 0.000002952 in. Hg

Key:

Psig = pounds per square inch gauge SCFM = standard cubic feet per minute

LPM = liter per minute Btu/Hr = British thermal units/hour

GPM = gallons per minute lb = libra (pounds in weight)

SLPM = standard liter per minute av = avoirdupois

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

10.2 System Specifications

Chuck Stage

X-Y Movement Range 310 mm

Resolution 0.5 µm

Repeatability +/- 2 µm

Accuracy +/- 4 µm

Maximum Speed 50 mm/sec

Drive Type DC servo with linear encoder

Z-Axis Movement Range 15 mm

Resolution 0.25 µm

Repeatability +/- 1 µm

Drive Type DC servo with rotary encoder

Theta Movement Range +/- 6

Resolution 0.0001

Drive Type DC servo with rotary encoder

Chuck Planarity +/- 15 µm

Microscope Stage

Programmable

X-Y Movement Range 50 mm

Resolution 0.25 µm

Repeatability +/- 1 µm

Accuracy +/- 2.5 µm

Drive Type DC servo with rotary encoder

Z-Axis Focus Range 50 mm

Resolution 0.1 µm

Repeatability +/- 1 µm

Drive Type DC servo with rotary encoder

Setup/Maintenance Lift 80 mm pneumatic

Optional:

Z-Axis focus range 130 mm

Resolution 0.2 µm

Repeatability +/- 5 µm

Drive Type DC servo with rotary encoder