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34 SUSS / PA300 / User Manual / M10-121841-00 / February 2002 7.3.2 F1-F3 Function Keys Key LEDs F1 F2 F3 Off-off Off-on On-off On-on ALIGN SET CONT / SET FOC REMOTE IDX POS GO HOME Z UP THETA REAL POS SET HOME Z DOWN IN…

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

7.3.1 Getting Started

This procedure guides the user through a typical set-up, from powering up the system

to aligning theta, setting contact and home, and entering an index.

1. Turn on the power to all components, as detailed in System Power-Up.

2. On the Joystick Controller select the stage to be used: chuck, microscope, platen

or probehead. For this example, the chuck is selected.

3. Select the control speed, typically Speed 4 at a low magnification to locate the

probe tips and target.

4. Press the ALT Key for the Z-axis controls; the right LED is lit. If the chuck is not in

the loading position (front middle), move the chuck there with the joystick. Load

the wafer on the pins and switch on the vacuum. Press Z UP until the wafer is lying

on the chuck in the center.

5. Ensure the platen is in the contact position and raise the chuck, using Z UP and Z

DOWN keys, F2 and F3, so the wafer or DUT is about 1-2 mm from the platen or

probecard. This allows the use of short probe tips and places the wafer within the

working range of probeheads. Press SET CONT, F1 to set contact at this point.

6. Since the chuck will not move while in contact, press Z-Axis Align to lower the

chuck.

7. Use the joystick and microscope focus to get the wafer and probe tips in view. If

equipped with motorized focus Z-axis controls, operate the focus when the

microscope is selected.

8. Press the ALT Key for Align, no are LED’s lit and F3. For a two-point alignment

position the wafer stage near the left (right) edge of the wafer and a horizontal

street or feature is aligned with a crosshair or probe tip reference point. Press

MARK 1. Move to the right (left) edge of the wafer and align with the same street or

feature and press MARK 2. The chuck theta then rotates to correct the rotational

error. Increased magnification and careful alignment increase accuracy. For probing

packaged parts, use the microscope software theta compensation.

9. Position the wafer chuck at the first test point and press SET HOME, Alt Key and

F3.

10. Press Z-Axis Contact to raise the chuck to contact position. Position all probes and

lower to contact.

11. The joystick and Z-Axis controls can now be used to move to more test points. An

index can be set with Alt Key, left LED lit and F3. The F1 and F2 Displays indicate

the index value. Change the index using the joystick and press F1 and F2 to enter.

12. Unloading: With Z DOWN, lower the chuck until it stops. Move chuck to the loading/

unloading position and switch off vacuum (“VAC”). Press Z DOWN until it will not

go further and remove the wafer from the pins.

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

7.3.2 F1-F3 Function Keys

Key LEDs F1 F2 F3

Off-off

Off-on

On-off

On-on

ALIGN

SET CONT / SET FOC

REMOTE

IDX POS

GO HOME

Z UP

THETA

REAL POS

SET HOME Z

DOWN

INDEX

QUIET / TURRET

ALIGN redefines the keys as CANCEL, MARK 1 and MARK 2, and starts the 2-point

alignment process.

1. To begin, position the wafer stage near the left (right) edge of the wafer so a

horizontal street or feature is aligned with a crosshair or probe tip reference point

and press MARK 1.

2. Move to the right (left) edge of the wafer and align with the same street or feature

and press MARK 2. The chuck theta will then rotate to correct the rotational error.

Increased magnification and careful alignment increases accuracy.

The same procedure can be used for theta alignment of the microscope and

probeheads. Although the chuck is physically rotated, the microscope and probeheads

are corrected with software. This allows the probehead rotational correction to track

the microscope, so aligning a microscope will automatically align the probeheads.

Packaged parts are easier to align to with the microscope rather than with the chuck.

GO HOME moves the selected stage to the X-Y home position as defined with Set

Home.

SET HOME defines the X-Y home position at the current position and zeros the X-Y

co-ordinates.

SET CONT defines the upper limit of chuck travel, set to provide adequate contact

without device or probe tip damaging excessive overtravel. When set, the function

becomes CL CONT to clear the contact position. The contact position must be set

each time the system is powered-up. The Z-Axis controls of Contact, Align and Separate

cannot be used until contact has been set. When choosing the microscope movement,

SET FOC is displayed – this saves the focus height. With CONTACT it is then moved

into its stored position.

Z UP moves the chosen stage upward at the selected speed.

Z DOWN moves the chosen stage downward at the selected speed.

REMOTE sets a flag to signal a tester the prober is ready, redefines the key as LOCAL

and disables all controls except this button. Pressing LOCAL resets the ready flag and

enables local controls.

THETA redefines the keys as CW, CENTER and CCW and controls the chuck theta in

clockwise, go to center and anticlockwise.

INDEX redefines the keys as X AXIS, Y AXIS and CANCEL. X and CANCEL Y indicate

the index value and may be changed using the joystick. After setting the index, press

the F1 and F2 keys to record. CANCEL exits the procedure.

IDX POS switches the display to show the current position in relation to the home

position in multiples of the set. F1 displays the X distance and F2, the Y value.

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

REAL POS switches the display to the stage position in µm from the home position. F1

displays the X distance, F2 the Y value and F3, the Z position

QUIET switches on the quiet mode. Once the control position has been reached,

electricity is taken away from all motors to reduce electrical noise interference to the

device under test.

TURRET Changes microscope objective. Display changes to DEC INC and chooses

the next smaller / larger objective.

7.4 PA300 Mechanic Assembly

The PA300 Semiautomatic Prober has a fully motorized chuck stage consisting of x, y,

z and theta, and typically a motorized microscope movement of x and y axes. Additionally

the platen, microscope focus and nosepiece and up to four motorized probeheads

may be installed. A pin drive is integrated in the Z axis.

7.4.1 Microscope Movement

The microscope movement mounts the microscope to the prober and provides a means

of viewing beyond the field of view when the chuck cannot be moved because probes

are in contact. The microscope movement consists of x and y axis translation and a

microscope lift; the microscope typically has a manual focus or z axis and nosepiece

controls, which can also be motorized.

There are several microscope movements available:

• Motorized,

• Manual coaxial knob type,

• Adjustable.

Motorized

All microscope x and y axes control, as well as a motorized focus and nosepiece, is

performed from the PC-based User Interface or Joystick Controller.

Manual Coaxial

To change the position of the microscope use the knobs located on the right side of the

microscope movement. The Drag Lever sets the amount of resistance for precise feel.

Adjustable

The Adjustable Mount is a fixed microscope mount with an adjustable fixed position.

This allows the microscope to be coarsely positioned or centered over the probe tips.

7.4.2 Platen and Controls

The platen supports the probeheads and probecard. The typical configuration is for

vacuum base probeheads and a manual movement mount. Other configurations can

include magnetic, bolt-down and clamping probehead bases, as well as fixed mount.

The lid should only be opened for loading and unloading of wafers and substrates but

should be closed during operation.