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SUSS / PA300 / User Manual / M10-121841-00 / February 2002 29 Minimum Connections These connections are required on a system with no additional options or accessories (not including power connections): a. Electronics rac…

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

6.4 Assembly

6.4.1 Chuck Stage

1. The chuck is secured by a bayonet-type mount that locks and unlocks with a rotating

movement. To install, position the four chuck mount pins in the mating holes of the

Z-axis, grasp the chuck at the outer edge and turn clockwise about 20 degrees.

2. Connect the vacuum hose and ground/bias lead to the chuck.

3. Install the stage covers after the system is powered up and the chuck planarity is

checked or adjusted.

6.4.2 Microscope and Movement

1. Mount the microscope (with adapter) to the microscope movement stage using the

four DIN 912 screws provided.

2. If equipped with a motorized focus, the connectors are plugged into the PC-board

under the sheet metal cover at the rear of the movement.

3. Install the objectives, eyepieces, camera adapter and camera on the microscope.

Note that the turret objective port covers are labelled to indicate the correct objective

location. Connect the fiber optic bundle from the microscope illuminator.

6.4.3 Platen

1. Raise the platen approximately 12 mm and push down firmly on all four corners of

the platen to ensure they are properly seated.

2. Lower the platen until it is approximately 2 mm above the full down position.

3. Install the platen height dial indicator on the bracket located on the rear of the

microscope bridge. Secure with the set screw.

4. Operate the contact/separation lever and ensure platen movement of 0.4 mm on

the indicator. If not, reposition the indicator as required.

6.4.4 Non-Electrical Utilities

Connect vacuum and air or nitrogen at the right rear corner of the mechanics.

6.4.5 Open Connections

In order to make safe connections the device must not be connected to the mains.

The probe system can be equipped with a wide range of accessories and options,

each with its own electrical interconnects. All plugs and connectors of SUSS

manufactured equipment are designed to prevent incorrect connections. Exercise extra

care when connecting other components. Generally all plugs and jacks will have number

or function labels to match up. The strapping wires should be mounted properly and

laid so that accidents can be ruled out.

Unused jump cables must not be used for anything else.

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

Minimum Connections

These connections are required on a system with no additional options or accessories

(not including power connections):

a. Electronics rack to probe station: Grounding (green/yellow) conductor

b. Electronics rack to mechanic: 3 large cables and connectors, mounted on a common

plate (2 optional).

c. Electronics rack to joystick controller - RS232 standard cable.

d. Electronics rack to computer (PC) - RS232 standard cable.

e. Computer (PC) to monitor, keyboard and mouse (if system is equipped with one).

Please refer to the Ergonomic Information Table in the appendix for more details.

Other Typical Connections

a. Electronics rack to motorized probeheads, edge and contact sensors.

b. Electronics rack to microscope illuminator

c. Camera to computer (PC) or a second monitor.

6.4.6 Electrical Utilities

All components that require AC power input will be labelled with the required input

voltage and VA or wattage.

Please ensure that all power connections are plugged into the correct voltage.

Components that require AC power include:

a. Electronics rack

b. Microscope illuminator

c. Computer (PC) and monitor

d. Camera power supply

Review the Installation Checklist and apply power to all components.

6.4.7 Additional Accessories and Options

All user or operator manuals for additional accessories and options, such as thermal

chuck or laser cutter, are included with the system. Read these manuals for the proper

installation and operation of these components.

6.4.8 System Power-up

Review the Installation Checklist in the appendix and to the Operation chapter for

more information.

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

7 Operation

7.1 Overview

A one day training in the operation of the system is generally included in the installation

by SUSS personnel or a trained representative. This does not remove the need to

study the operating instructions closely.

The SUSS PA300 Semiautomatic Probe System is a high-performance analytical prober.

The minimum configuration is a fully motorized chuck stage, including x, y, z and theta.

Standard options include motorized microscope x, y, focus and turret, and motorized

probeheads. It is equipped with the ProberBench

Operating System for maximum

ease-of-use, flexibility and connectivity.

The system’s electronic rack houses all motor drivers, I/O circuits and power supplies.

An Emergency Machine Off (EMO) circuit, with buttons on the mechanic and electronic

rack, is designed to meet S2-93 standards. A powerful command set, standard RS232,

and optional IEEE488 interfaces, provide flexibility for connecting to testers and control

computers.

The prober’s user interface consists of a joystick controller and a Windows

interface

on a PC. The joystick control provides hands-off control of all prober movements, as

well as setting index, setting and going home and contact, 2-point alignment and start

flag. It is ideal for simple, hands-off probing or for the basic wafer set-up required

when interfaced to a tester.

The ProberBench

User Interface provides complete control of SUSS probers. This

includes an on-screen joystick, parameter entry such as wafer diameter, stepping index

and contact position, prompted routines, for example, theta alignment and the recording

of step-and-repeat patterns. All parameters, user preferences and options, as well as

which windows are open and their positions are saved in project files so you can

immediately return to your task without setting up. Although not required to operate the

probe system, the user interface offers programmed automation, data acquisition and

much greater control than using the joystick controller alone.

7.2 Electronics Rack

The Electronics Rack consists of the drive and control circuitry for powering a fully

equipped probe system. This includes the chuck stage x, y, z and theta, microscope x,

y, focus and turret and four probeheads with x, y and z. Also accommodated are an

IEEE488 card, two contact sense cards and a peripheral interface for controlling the

microscope illuminator, laser trigger, test beacon and an auxiliary port. A RS232 port is

used to communicate with the PC. The only user controls are the EMO Main Power

Switch and Off and On Buttons.