SussPA300UserGuide.pdf - 第6页
SUSS / PA300 / User Manual / M10-121841-00 / February 2002 5 Safety Instructions and Symbols D US F I Achtung, bewegte Teile! Verletzungsgefahr! Im eingeschalteten Zustand nicht hineingreifen! Attention, moving parts! Da…
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SUSS / PA300 / User Manual / M10-121841-00 / February 2002
Manufacturer Information
System: Semi-Automatic Probe System PA300
Manufacture Date: This manual has been written for systems
that were built from 2001.
Version: Kernel V 3.4
Manufacturer:
SUSS Microtec Test Systems GmbH
Süss - Strasse 1
D-01561 SACKA
Germany
Tel: [+49] (0) 35240 - 73 - 0
Fax: [+49] (0) 35240 - 73 - 700
Email: prober@suss.de
For maintenance and repair contact our service department:
Europe:
Tel: [+49] (0) 35240 - 73 - 220/- 221
Fax: [+49] (0) 35240 - 73 - 722
Email: service@sussdd.de
France: Switzerland:
Tel: [+33] 450 - 35 - 8392 Tel: [+41] 56 - 4832 - 525
Fax: [+33] 450 - 35 - 8801 Fax: [+41] 56 - 4832 - 520
Japan: Asia:
Tel: [+81] 45 - 931 - 5600 Tel: [+66] 2 - 938 - 44 - 26/- 27
Fax: [+81] 45 - 931 - 5601 Fax: [+66] 2 - 512 - 5569
USA:
Tel: [+001] 802 - 244 - 5181
Fax: [+001] 802 - 244 - 5103
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
5
Safety Instructions and Symbols
D
US
F
I
Achtung, bewegte Teile! Verletzungsgefahr! Im eingeschalteten Zustand nicht
hineingreifen!
Attention, moving parts! Danger of injury! Do not touch the machine when
switched on!
Attention, pièces en mouvement! Risque de blessures! Ne pas toucher pendant
le fonctionnement de la machine!
Attenzione, parti in movimento! Pericolo, non toccare se la maccina è in
funzione!
D
US
F
I
Achtung, heiße Flächen! Verbrennungsgefahr! Im aktiven Zustand nicht
berühren!
Attention, hot surfaces! Danger of burning! Do not touch when active!
Attention, zones chaudes! Risque de brulures! Ne pas toucher si actif!
Attenzione superficie calda! Rischio di ustioni, non toccare una volta attivo!
D
US
F
I
Achtung, kalte Flächen! Erfrierungsgefahr! Im aktiven Zustand nicht berühren!
Attention, cold surfaces! Danger of freezing! Do not touch when active!
Attention, zones froides! Risque de brulures! Ne pas toucher si actif!
Attenzione superficie fredda! Rischio di congelamento, non toccare una volta
attivo!
D
US
F
I
Achtung, Laserstrahlen! Ohne Augenschutz Verletzungsgefahr!
Attention, laser beams! Danger of getting hurt without eye protection!
Attention rayonnement Laser! Risque de cécité en l’absence de lunettes de
securité!
Attenzionne raggio laser! Pericolo ustioni, non tocarre se la macchina è in
fuzione!
D
US
F
I
Achtung, spannungsführende Teile! Gefahr des elektrischen Schlages! Im
eingeschalteten Zustand nicht berühren!
Attention, high voltage! Danger of electrical shock! Do not touch during
operation!
Attention, haute tension! Risque d’électrocution! Ne pas toucher pendant le
fonctionnement de la machine!
Attenzione alta tensione! Pericolo, non toccare se la macchina è in fuzione!
D
US
F
I
Achtung, allgemeiner Gefahrenhinweis! Informationen im Handbuch beachten!
Attention, general hazard! Pay attention to the information given in the
manuals!
Attention, danger! Consulter les informations fournies dans les notices de la
machine!
Attenzione pericolo! Leggere attentamente il manuale!
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SUSS / PA300 / User Manual / M10-121841-00 / February 2002
1 Introduction
1.1 Scope of the Document
This document contains the facilities design and equipment installation requirements
for the PA300 and conforms to SEMI E6 and SEMI S13 guidelines and formats. Design
and installation requirements vary with each owner and project. Therefore this guideline
is designed to cover all possible tasks that can be carried out using the equipment.
The successful installation and operation of semiconductor equipment is the mutual
objective of the owner, the operator, the installer and the supplier. Within the
semiconductor industry, the diversity and complexity of equipment have created
significant problems for those who design the facilities and install the equipment. It is
very difficult to stay current with the ever changing requirements necessary for individual
pieces of equipment. As a result, it is difficult to guarantee that the facilities will meet
the needs of each piece of equipment.
It is recommended that this manual is read thoroughly before any work is started with
the PA300 and that all safety instructions are taken into consideration.
1.2 Purpose of System
The PA300 is an analytical prober conforming to EN 61010 - 1: 1993-04 which
corresponds to UL 3101-1: 1993 and IEC 1010-1: 1992.
By means of the PA300 electrical measurements on wafers and substrates up to a
diameter of 300mm can be made. The only electrical connection to the measuring
object is through the probecard, the probehead and the chuck.
1.3 Acceptance Test
Tests will be performed to demonstrate that the facilities meet requirements:
______ Yes ü No
See appendix for further information.
1.4 Training
Special training will be required:
___ü Yes ______ No
User’s personnel are required to be trained in the operation and maintenance of the
equipment as a prerequisite to supplier-supplied training and prior to operation, use or
maintenance.
The supplier will provide training at the user’s site (optional).