SussPA300UserGuide.pdf - 第33页

32 SUSS / PA300 / User Manual / M10-121841-00 / February 2002 7.3 Joystick Controller The Joystick Controller provides remote control of all probe system motorized stages including wafer chuck, microscope, probeheads and…

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

7.2.1 System Power-Up

System power-up prepares the prober for use from the Joystick Controller and the

User Interface.

1. Rotate the Electronics Rack Main Power Switch to the On position. The green

lamp will light indicating power to the electronics and the EMO System. Press the

green On button. The integral green lamp will light. If the lamp is not lit, ensure the

latching EMO button on the mechanic is in the released position.

Note: The boot up sequence of the User Interface, running on the PC,

includes establishing communications with the Electronics Rack.

Therefore the electronics must be on before starting the User Interface

to prevent a communications error.

If an error occurs, turn on the electronics and click OK in the error message box.

2. Turn on power to the PC, monitor and all ancillary equipment, such as the

microscope illuminator, laser cutter and camera.

3. The system is now ready for use with the Joystick Controller or from Microsoft

Windows

7.2.2 Controls and Functions

Main Power Switch (EMO)

Power On Lamp

On Button (green)

Off Button (red)

EMO Main

Power Switch

Applies power to the electronics rack and to the EMO

system. Power is supplied to the entire system by

pressing the On button.

Power On

Lamp

Illuminated when the Main Power Switch is on and the

specified line voltage is present.

Off Button

Stops all machine movement and removes all

voltages except the 24 VAC EMO power supply.

On Button

Used to energize the EMO system to apply power to

the probe system. The integral green lamp is lit when

the system is ready for use. The EMO Main Power

Switch must be on for the On button to be operable.

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

7.3 Joystick Controller

The Joystick Controller provides remote control of all probe system motorized stages

including wafer chuck, microscope, probeheads and platen. The most common

functions, such as load, vacuum, go and set home and contact and two-point alignment

are also provided. It can be used with or without a PC.

Joystick

Used to move motorized stages in the X and Y axes. The joystick

provides proportional control based on the amount of joystick

deflection.

LED Displays (3x)

Indicates the use of the F1-F3 function key below it and updates

each time the Alt key is pressed.

F1-F3 Function

Keys

Used in conjunction with the Alt Key to provide 12 additional

functions. Pressing the key will either carry out the function or

redefine the keys with new functions.

Alt Key

A four-state key as indicated by its LEDs: off-off, off-on, on-off and

on-on. Each press of the Alt key will display the next three functions

in the LED displays.

Lift Key

Raises the microscope to change objectives or facilitate setup. The

LED is lit when the microscope is up.

Select Keys (7x)

Defines the stage to be controlled by the joystick and which stage

the function keys relate to.

Speed Keys (5x)

Sets the speed at which stages move in response to the joystick.

Speed 1: jogs or moves at the smallest stepping increment

Speed 2-4: each cover a speed range (4 = 100%)

Index: moves at a user-defined index value in X or Y direction.

Z-Axis Keys (3x)

Moves the selected stage or probehead to the defined contact, align

and separate positions. Contact must be set by the user before

these keys are operational.

Chuck Keys (2x)

Load lowers the chuck to the lowest or load position, centers in the

X axis and forward towards the user.

Vacuum controls the vacuum to the chuck stage for securing the

wafer or DUT.

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

7.3.1 Getting Started

This procedure guides the user through a typical set-up, from powering up the system

to aligning theta, setting contact and home, and entering an index.

1. Turn on the power to all components, as detailed in System Power-Up.

2. On the Joystick Controller select the stage to be used: chuck, microscope, platen

or probehead. For this example, the chuck is selected.

3. Select the control speed, typically Speed 4 at a low magnification to locate the

probe tips and target.

4. Press the ALT Key for the Z-axis controls; the right LED is lit. If the chuck is not in

the loading position (front middle), move the chuck there with the joystick. Load

the wafer on the pins and switch on the vacuum. Press Z UP until the wafer is lying

on the chuck in the center.

5. Ensure the platen is in the contact position and raise the chuck, using Z UP and Z

DOWN keys, F2 and F3, so the wafer or DUT is about 1-2 mm from the platen or

probecard. This allows the use of short probe tips and places the wafer within the

working range of probeheads. Press SET CONT, F1 to set contact at this point.

6. Since the chuck will not move while in contact, press Z-Axis Align to lower the

chuck.

7. Use the joystick and microscope focus to get the wafer and probe tips in view. If

equipped with motorized focus Z-axis controls, operate the focus when the

microscope is selected.

8. Press the ALT Key for Align, no are LED’s lit and F3. For a two-point alignment

position the wafer stage near the left (right) edge of the wafer and a horizontal

street or feature is aligned with a crosshair or probe tip reference point. Press

MARK 1. Move to the right (left) edge of the wafer and align with the same street or

feature and press MARK 2. The chuck theta then rotates to correct the rotational

error. Increased magnification and careful alignment increase accuracy. For probing

packaged parts, use the microscope software theta compensation.

9. Position the wafer chuck at the first test point and press SET HOME, Alt Key and

F3.

10. Press Z-Axis Contact to raise the chuck to contact position. Position all probes and

lower to contact.

11. The joystick and Z-Axis controls can now be used to move to more test points. An

index can be set with Alt Key, left LED lit and F3. The F1 and F2 Displays indicate

the index value. Change the index using the joystick and press F1 and F2 to enter.

12. Unloading: With Z DOWN, lower the chuck until it stops. Move chuck to the loading/

unloading position and switch off vacuum (“VAC”). Press Z DOWN until it will not

go further and remove the wafer from the pins.