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50 SUSS / PA300 / User Manual / M10-121841-00 / February 2002 Indicator Part SESC Criteria Actual Value Notes Full body clearance standing/ sitting position to be supplied by the customer see section 2.9.1 Any posture: u…

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

10.3 Ergonomic Information Table

Indicator Part

SESC

Criteria

Actual value Notes

Manual Material

Handling

2 hand lifting or

lowering tasks: if object

weighs more than

22.5N

If larger, analysis

is necessary

Smaller than

22.5N

N/A

Product Loading in a

Standing Position

Clearance for finger

thickness

min. 38 mm >38 mm Yes

Clearance for hand

thickness

min. 76 mm

>76 mm

<240 mm

Yes

Reach distance from

leading edge of tool to

hand coupling point

max. 330 mm <330 mm Yes

Vertical coupling point

of hand to product in

load position

with KSD

vibration isolation

table

max. 1010 mm

min. 890 mm

norm 1077 mm

difference

67 mm

Wafer cassette

N/A

Wafer cassette

storage

N/A

Manual cassette

rotation device

N/A

Handle design

(suitable for use with

cleanroom gloves)

vacuum tweezers optional use

Handle surface finish vacuum tweezers

Cylindrical handle

diameter

vacuum tweezers

max. 38 mm

min. 25 mm

(min. 19 mm -

SEMI S8-95A)

17 x 21 mm

difference

2 mm

Cylindrical handle

length

vacuum tweezers min. 127 mm 160 mm Yes

Other types of handle N/A

Maintainability and

Serviceability

Minimal lighting level min. 300 lux

to be supplied by

the customer

see

section

2.9

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

Indicator Part

SESC

Criteria

Actual Value Notes

Full body clearance

standing/ sitting

position

to be supplied by

the customer

see

section

2.9.1

Any posture: upper

body clearance

(shoulder width)

min. 610 mm

see

section

2.9.1

Standing position:

Height;

Width;

min. 1980 mm

min. 690 mm

to be supplied by

the customer

see

section

2.9.1

Sitting Position (on

floor):

Height;

Width;

Working height;

min. 1000 mm

min. 690 mm

min. 280 mm

to be supplied by

the customer

see

section

2.9.1

Squatting (on floor):

Height;

Width;

Working height;

min. 1220 mm

min. 790 mm

min. 460 mm

to be supplied by

the customer

see

section

2.9.1

Kneeling (on floor):

Height;

Width;

Working height;

min.1450 mm

min. 1220 mm

min. 640 mm

to be supplied by

the customer

see

section

2.9.1

Kneeling crawl (on

floor):

N/A

Stooping (on floor):

Height;

Width;

Working height;

min. 1450 mm

min. 1020 mm

min. 640 mm

to be supplied by

the customer

see

section

2.9.1

Supine (lying on back): N/A

Prone (lying on front): N/A

Hand/Arm Clearance

(for use with clean-

room gloves only)

Finger access

(diamater):

2, 3, or 4 finger access:

min. 32 mm

object + 58 mm

i.e.: PH150: 2

finger access,

>32 mm

Yes

Flat hand to wrist

access:

Height, palm thickness;

Width, palm width;

loading tray min. 89 mm

min. 114 mm

>89 x 114 mm

Yes

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

Indicator Part

SESC

Criteria

Actual Value Notes

Fist to wrist access:

Height;

Wrist;

loading tray min. 89 mm

min. 127 mm

>89 x 127 mm Yes

2 arms to shoulders N/A

2 hands to wrists N/A

1 arm to shoulder N/A

1 arm to elbow N/A

Maintenance and

Service Access

Access openings for

frequent service

intervention

optical and

physical access

openings, if

necessary

N/A

Enclosures and covers supports present removeable Yes

Enclosures and covers handles

not for frequent

service

N/A

Enclosures and covers handles

not for frequent

service

N/A

Replaceable

Components

not to be

replaced by

customer

N/A

Connectors, plugs etc.

should be labelled

demanded if not

valued in SEMI

N/A

Circuit boards mounted

in card cage

configuration should

have mounting and

removal aids

finger access,

handles etc.

Handles from PB

electronic socket

units are not

accessible from

the outer side

Yes

Display Units

control box /

monitor

installation left to

the customer

see

section

2.9.2

Location of operator

primary interface

(standing)

1 or 2 screens

are possible

to be determined

by the customer

optional

Height of monitor (from

floor to middle of

screen)

max. 1470 mm

min. 1320 mm

location to be

determined by

the customer

see

section

2.9.2

Height of monitor (from

floor to top of screen)

max. 1680 mm

according to

configuration, 1

or 2 monitors,

location to be

determined by

the customer

see

section

2.9.2