SussPA300UserGuide.pdf - 第8页
SUSS / PA300 / User Manual / M10-121841-00 / February 2002 7 2 Safety IMPORTANT: This section contains information that the user must know and understand to minimize the risk of injuries. SUSS equipment is designed to pr…
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SUSS / PA300 / User Manual / M10-121841-00 / February 2002
1 Introduction
1.1 Scope of the Document
This document contains the facilities design and equipment installation requirements
for the PA300 and conforms to SEMI E6 and SEMI S13 guidelines and formats. Design
and installation requirements vary with each owner and project. Therefore this guideline
is designed to cover all possible tasks that can be carried out using the equipment.
The successful installation and operation of semiconductor equipment is the mutual
objective of the owner, the operator, the installer and the supplier. Within the
semiconductor industry, the diversity and complexity of equipment have created
significant problems for those who design the facilities and install the equipment. It is
very difficult to stay current with the ever changing requirements necessary for individual
pieces of equipment. As a result, it is difficult to guarantee that the facilities will meet
the needs of each piece of equipment.
It is recommended that this manual is read thoroughly before any work is started with
the PA300 and that all safety instructions are taken into consideration.
1.2 Purpose of System
The PA300 is an analytical prober conforming to EN 61010 - 1: 1993-04 which
corresponds to UL 3101-1: 1993 and IEC 1010-1: 1992.
By means of the PA300 electrical measurements on wafers and substrates up to a
diameter of 300mm can be made. The only electrical connection to the measuring
object is through the probecard, the probehead and the chuck.
1.3 Acceptance Test
Tests will be performed to demonstrate that the facilities meet requirements:
______ Yes ü No
See appendix for further information.
1.4 Training
Special training will be required:
___ü Yes ______ No
User’s personnel are required to be trained in the operation and maintenance of the
equipment as a prerequisite to supplier-supplied training and prior to operation, use or
maintenance.
The supplier will provide training at the user’s site (optional).
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
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2 Safety
IMPORTANT: This section contains information that the user must know and
understand to minimize the risk of injuries.
SUSS equipment is designed to protect the user against all possible hazards. After
review by qualified safety personnel, the user should generate specific safety procedures
with regard to the particular application of the equipment and local regulations, and
make certain that operators are familiar with the procedures.
2.1 General Precautions
1. Read and understand the User Manual before using the system.
2. This system needs to be handled carefully to ensure no harm comes to the user.
3. During use there is the danger of crushing, tripping, burning or being caught up in
the system. These dangers cannot be avoided due to the function of the system
but any areas of danger are clearly labeled with the signs overleaf. These should
be studied carefully in order to avoid unnecessary risk.
4. Do not reach into the prober when it is plugged into the mains. Do not reach into
the chuck area – danger of getting caught. The rear area is open when working
with a probe card adapter, therefore increased risk.
5. Never use the system with open or removed safety cover. Danger through moving
parts.
6. System is under low voltage (up to 28 V d.c.). In case of equipment failure the low
voltage can be present until the operator switches the current off at the main switch.
Do not touch the electrical connections.
7. Do not touch the probe head needles with your fingers as this will dirty them and
may result in injury.
8. Choose the position of the control panel so that the joystick cannot be inadvertently
operated.
Please take notice of the national and international safety regulations for example
BVG 4 and EC User Guidelines 89/655/EWG from November 1989.
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SUSS / PA300 / User Manual / M10-121841-00 / February 2002
2.2 General Requirements
Safety related checks should be performed to supplier specification prior to system
acceptance (please refer to the installation checklist in the appendix). These safety
checks which are carried out at installation should be accepted by both the supplier
and the customer.
The installation site acceptance test should be signed by the supplier and the customer.
The following test should be performed prior to acceptance in order to verify that the
system meets certain requirements:
§ Statement of Conformance to SEMI S2
§ Safety interlocks function and shut down correct hazards
§ Ability to lock out hazardous energy sources prior to maintenance
§ Site-specific installation does not degrade tool’s ergonomic design factors (please
refer to the Ergonomic Information Table in the appendix)
§ Interface to building systems function as intended
§ Radio frequencies, electrostatic discharge and non-ionizing radiation
2.3 Electrical Precautions
The prober electronics rack contains electrical circuits with lethal voltage and current
levels. Do not open or remove covers during operation. Service of the electrical system
should be performed only by qualified personnel and only after pulling the mains cable
from the socket.
When probing high voltage devices, lethal high voltages may be present at the probe
tips, probe head connections, and on non-shielded or non-isolated probe arms. It is
therefore essential that the user avoid coming in contact with these system components
during test.
2.4 Moving Parts
SUSS has taken precautions to protect the operator by enclosing all moving parts as
much as possible without impeding the operation of or access to the prober. The
operator should not reach into the prober during operation and take care to keep
loose clothing or long hair from getting caught in the system. Use the system with
open or removed safety cover. The Interlock stops the mechanical stage moving while
the loading lid is open. Use this lid to load and unload wafers and substrates when the
chuck is in the loading position. Do not remove or change any safety signs.
2.5 Laser Precautions
The prober may optionally be equipped with a laser cutter. Avoid eye and skin exposure
to direct or scattered radiation. The accompanying manual should be read thoroughly
before the laser cutter is used and safety instructions should be taken into consideration.