SussPA300UserGuide.pdf - 第45页

44 SUSS / PA300 / User Manual / M10-121841-00 / February 2002 10.2 System Specifications Chuck Stage X-Y Movement Range 310 mm Resolution 0.5 µm Repeatability +/- 2 µm Accuracy +/- 4 µm Maximum Speed 50 mm/sec Drive Type…

100%1 / 62
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
43
10 Appendix
10.1 Equipment Data Base Units
Item
International
Units
American
Units
Formula
Physical Properties
Distance mm in. 1 mm = 0.03937 in.
Weight kg lb. (av) 1 kg = 2.2046 lb. (av)
Temperature °C °F (1.8 x °C) + 32 = °F
Heat watts Btu/Hr 1 W = 3.41221 Btu/Hr
Exhaust
Size mm in. 1 mm = 0.03937 in.
Pressure Pa in. of H
2
O 1 Pa = 0.0040146 in. of H
2
O
Flow m
3
/h CFM 1 m
3
/h = 0.5833 CFM
Fitting Size mm in. (nominal) 1 mm = 0.03937 in.
Liquid
Pressure kPa psig 1 kPa = 0.1450 psig
Temperature °C °F (1.8 x °C) + 32 = °F
Flow LPM GPM 1 LPM = 0.2641 GPM
Fitting Size mm (nominal) in. (nominal) 1 mm = 0.03937 in.
Vacuum
Size mm (nominal) in. (nominal) 1 mm = 0.03937 in.
Pressure Pa in. Hg 1 Pa = 0.0002952 in. Hg
Flow SLPM SCFM 1 SLPM = 0.035 SCFM
Fitting Size mm (nominal) in. (nominal) 1 mm = 0.03937 in.
Pressure mbar in. Hg 1 mbar = 0.000002952 in. Hg
Key:
Psig = pounds per square inch gauge SCFM = standard cubic feet per minute
LPM = liter per minute Btu/Hr = British thermal units/hour
GPM = gallons per minute lb = libra (pounds in weight)
SLPM = standard liter per minute av = avoirdupois
44
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
10.2 System Specifications
Chuck Stage
X-Y Movement Range 310 mm
Resolution 0.5 µm
Repeatability +/- 2 µm
Accuracy +/- 4 µm
Maximum Speed 50 mm/sec
Drive Type DC servo with linear encoder
Z-Axis Movement Range 15 mm
Resolution 0.25 µm
Repeatability +/- 1 µm
Drive Type DC servo with rotary encoder
Theta Movement Range +/- 6
°
Resolution 0.0001
°
Drive Type DC servo with rotary encoder
Chuck Planarity +/- 15 µm
Microscope Stage
Programmable
X-Y Movement Range 50 mm
Resolution 0.25 µm
Repeatability +/- 1 µm
Accuracy +/- 2.5 µm
Drive Type DC servo with rotary encoder
Z-Axis Focus Range 50 mm
Resolution 0.1 µm
Repeatability +/- 1 µm
Drive Type DC servo with rotary encoder
Setup/Maintenance Lift 80 mm pneumatic
Optional:
Z-Axis focus range 130 mm
Resolution 0.2 µm
Repeatability +/- 5 µm
Drive Type DC servo with rotary encoder
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
45
Microscope Stage
Manual
X-Y Movement Range 50 mm
Drive Type coaxial knobs
Setup/Maintenance Lift manual, tilt-back
Adjustable
X-Y Movement Range 50 mm
Drive Type Clamping
Platen
Manual
Separation Stroke 400 µm
Coarse Adjustment Range 35 mm
Drive Type Compound knob
Fixed Probehead Mounting Vacuum, magnetic and high frequency bolt-
down and kinematic clamping.
Probecard Mounting Accepts standard SUSS probecard holder
for 4.5“ and 6“ probecards.
Lubrication
Microscope stage spindles Grease once every year
Microscope stage bearing rails Grease once every year
Chuck X-Y stage drive spindles Grease once every 12 weeks
Chuck Z-axis spindle Oil once every 12 weeks
Chuck Z-axis bearing rails Oil once every 1 year
Software
PC Minimum Requirement Please contact SUSS for more information
Operating System Windows NT4.0 & 2000 Professional
Control Software SUSS ProberBench
®
5
Interfaces
RS232 Electronics Standard
IEEE488 Electronics Optional
IEEE488 PC Optional