SussPA300UserGuide.pdf - 第41页

40 SUSS / PA300 / User Manual / M10-121841-00 / February 2002 1. Loosen the set screw in the four corners of the platen, then move the chuck Z-Axis to its highest position and the platen to its lowest position. 2. Use fe…

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

2. Planarization can be measured with a dial indicator or with the microscope. This

procedure will rely on the microscope, which when used with a 50x objective (500x

total magnification) provides a 2 micron depth of focus.

3. The chuck level will be checked near the edge of the chuck and in-line with each

levelling screw, which are approximately at each corner. You can move to these

positions with the joystick or enter the positions in a TableView file and click on

each site to quickly move to it.

4. Move to each of the three sites and determine which one is the lowest by noting if

the microscope was raised or lowered to focus. The lowest will be the reference

point (site #1) to which the other two will be adjusted. The lowest is used to maintain

maximum spring pressure of the levelling mechanism.

Note: Planarization is done with the chuck surface, not a wafer which may

not be planar.

5. Move to site #1 and focus using the microscope.

6. Move to site #2 and adjust the chuck levelling screw at this site so the chuck is in

focus. Do not focus using the microscope.

7. Move to site #3 and adjust the chuck levelling screw at this site so the chuck is in

focus. Do not focus using the microscope.

8. Repeat steps 5 through to 7 until all three sites remain in focus.

9. Reinstall stage covers.

8.4.2 Platen Levelling Procedure

Set screw

Levelling screw

Note: This procedure should be performed only after the chuck has been

properly planarized or levelled.

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

1. Loosen the set screw in the four corners of the platen, then move the chuck Z-Axis

to its highest position and the platen to its lowest position.

2. Use feeler gauges to check the gap between the chuck and the platen at four

places around the center opening. The gap should be 1 mm ± 0.05 mm.

3. If adjustment of one or more corners is required, loosen the appropriate lock screw(s)

and raise or lower the corner(s) using the adjusting screw.

4. Repeat the measurements since adjusting one corner usually affects the others.

5. When the adjustment is complete, tighten the lock screws and reset all four set

screws.

8.4.3 Chuck Stage Z Axis End Limit Sensor Adjustment

The chuck stage Z axis end limit sensors are accurately adjusted before leaving the

factory. If they should need readjusting, please contact your local SUSS Service

department for more details.

8.4.4 Microscope Stage Pneumatic Up/Down Adjustment

The motion of the microscope should be smooth and precise to avoid causing excessive

shock to the system.

1. Remove the sheet metal stage cover.

2. Adjust the main incoming pressure regulator located next to the cylinder to ensure

that a minimum of 4 bar is available.

3. Individually adjust the up and down speeds using the cylinder incoming throttle for

the up direction and the cylinder exhaust throttle for the down direction. The up

speed can be slightly faster than the down speed.

Platen

Set screw

Lock screw

Chain

Adjustment screw

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

8.5 Preventive Maintenance

The PA300 requires minimal preventive maintenance. In general, care should be taken

to keep the system clean and covered when not in use (e.g. overnight) and the following

periodic cleaning and lubrication procedures should be performed at the recommended

intervals.

Only a SUSS Field Service Representative or SUSS trained personnel should carry

out preventive maintenance.

8.5.1 Annual Operational Check

1. Remove, disassemble, and clean covers and adjust the planarity of the chuck and

the microscope.

2. Inspect all moving parts; clean and lubricate where necessary.

3. Check all basic adjustments including software compensation.

8.5.2 Lubrication

A list of parts which require lubrication and the recommended lubrication intervals

(assuming eight (8) hours per day operation) are shown below. The specified grease

is Kluber NBU 8 EP; the specified oil is a resin-free precision machine oil, such as

Custanol F. These products can also be purchased from Karl Suss.

Point of Lubrication Interval Lubricant

Microscope stage spindles 1 year grease

Microscope stage bearing rails 1 year grease

Chuck X-Y stage drive spindles 12 weeks grease

Chuck Z axis bearing rails 4 weeks oil

Please note that it is also possible to sign a separate contract with SUSS MicroTec for

these maintenance procedures. Please contact your SUSS Service Department for

further details. Contact information can be found at the front of this manual.