SussPA300UserGuide.pdf - 第3页
2 SUSS / PA300 / User Manual / M10-121841-00 / February 2002 4 MAIN COMPONENTS OF THE SYSTEM 17 4.1 Typical System Data 17 4.2 The Basic Prober 18 4.2.1 System Dimensions 18 4.2.2 Non-electrical Utilities 19 4.2.3 Electr…
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
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Contents
MANUFACTURING INFORMATION 4
SAFETY INSTRUCTIONS AND SYMBOLS 5
1 INTRODUCTION 6
1.1 Scope of the Document 6
1.2 Purpose of System 6
1.3 Acceptance Test 6
1.4 Training 6
2 SAFETY 7
2.1 General Precautions 7
2.2 General Requirements 8
2.3 Electrical Precautions 8
2.4 Moving Parts 8
2.5 Laser Precautions 8
2.6 Thermal Precautions 9
2.7 Risk Valuation 9
2.8 User Information 9
2.9 Ergonomic Information 10
2.9.1 Clearances 10
2.9.2 Display Units 10
2.10 Connections 10
2.11 Utility Distribution 12
3 FACILITY REQUIREMENTS AND
INTERFACE COMPATIBILITY 13
3.1 Facility Requirements 13
3.1.1 Environmental Requirements 13
3.1.2 Noise Level 14
3.1.3 RF Frequencies, Electrostatic Discharge & Non-ionizing Radiation 14
3.2 Vibration Requirements and Earthquake Protection 14
3.3 Media Requirements 14
3.3.1 Vacuum 14
3.3.2 Compressed Air 15
3.3.3 Power 15
3.4 Communication Interface 15
3.5 Shipping and Receiving Requirements 16
3.5.1 Equipment Data Information 16
3.5.2 Packaging 16
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SUSS / PA300 / User Manual / M10-121841-00 / February 2002
4 MAIN COMPONENTS OF THE SYSTEM 17
4.1 Typical System Data 17
4.2 The Basic Prober 18
4.2.1 System Dimensions 18
4.2.2 Non-electrical Utilities 19
4.2.3 Electrical Utilities 19
4.2.4 Open Connections 20
4.2.5 Loading Lid with Interlock 20
4.2.6 Accessories 21
4.3 Emergency Off (EMO) Switch 21
4.3.1 Main Power Switch on Electronics Rack 21
4.3.2 EMO Switch on Probe Station 21
4.4 Joystick Controller 22
4.5 Electronics Rack 23
5 MATERIAL REQUIREMENTS 24
5.1 Wafer Handling 24
5.2 Wafer Carriers 24
5.3 Wafer Alignment 24
5.4 Loading a Substrate or Wafer 24
6 INSTALLATION 25
6.1 Shipping and Receiving Requirements 25
6.1.1 Equipment Data 25
6.1.2 Packaging 26
6.2 Unpacking 26
6.3 Mechanic Transport Locks 27
6.3.1 Platen 27
6.3.2 Microscope Movement 27
6.3.3 Chuck Stage 27
6.4 Assembly 28
6.4.1 Chuck Stage 28
6.4.2 Microscope and Movement 28
6.4.3 Platen 28
6.4.4 Non-Electrical Utilities 28
6.4.5 Open Connections 28
6.4.6 Electrical Utilities 29
6.4.7 Additional Accessories and Options 29
6.4.8 System Power-up 29
7 OPERATION 30
7.1 Overview 30
7.2 Electronics Rack 30
7.2.1 System Power-Up 31
7.2.2 Controls and Functions 31
7.3 Joystick Controller 32
7.3.1 Getting Started 33
7.3.2 F1-F3 Function Keys 34
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
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7.4 PA300 Mechanic Assembly 35
7.4.1 Microscope Movement 35
7.4.2 Platen and Controls 35
8 USER MAINTENANCE 38
8.1 General Maintenance 38
8.2 Visual Checks 38
8.3 Safety Interlock Switch 38
8.4 Mechanical Adjustments 38
8.4.1 Chuck Planarizing Procedure 38
8.4.2 Platen Levelling Procedure 39
8.4.3 Chuck Stage Z Axis End Limit Sensor Adjustment 40
8.4.4 Microscope Stage Pneumatic Up/Down Adjustment 40
8.5 Preventive Maintenance 41
8.5.1 Annual Operational Check 41
8.5.2 Lubrication 41
9 TROUBLESHOOTING 42
9.1 System Does Not Power-Up 42
9.2 Mechanics Do Not Respond to the Joystick Controller 42
9.3 Mechanics Do Not Respond to the User Interface (PC) 42
9.4 Stages Do Not Position Correctly 42
10 APPENDIX 43
10.1 Equipment Data Base Units 43
10.2 System Specifications 44
10.3 Ergonomic Information Table 49
10.4 Installation Checklist 56
11 HEALTH HAZARD ANALYSIS 57
11.1 Process Health Hazard Analysis 57
11.1.1 Use of Instruments 57
11.1.2 Safety Conception 57
11.2 Electronics 58
11.2.1 Basic Design 58
11.2.2 Guidelines for Electronics in the User Information 58
11.3 Radiation 58
11.4 Earthquake Safety 58
11.5 Total Risk Evaluation 58
12 WARRANTY AND LIMITATIONS 59
12.1 Scope 59
12.2 Who is Protected 59
12.3 How to Receive a Warranty Service 60