SussPA300UserGuide.pdf - 第17页
16 SUSS / PA300 / User Manual / M10-121841-00 / February 2002 3.5 Shipping and Receiving Requirements 3.5.1 Equipment Data Information Environmental Requirements Operate Standby Ambient Temperature (°C) 5 - 40 N/A Ambien…
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
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3.3.2 Compressed Air
Filtered, dry and oil free air of at least 0.4 MPa or 4 bar up to 1 MPa or 10 bar; flow rate
is insignificant.
System Input
U.S. installations are 1/4“ hose, international installations are 6 mm.
3.3.3 Power
U.S. Installations
The basic prober requires two grounded (3-pronged) 115 V / 60 Hz / 20 A outlets within
1.8 m of the location of the unit, depending on the set-up. A power distribution strip
with 6 sockets is supplied with the system.
International Installations
The system requires 230 V / 50 Hz a.c., 510 VA power. Optional accessories will
require additional outlets.
3.4 Communication Interface
1 Serial interface
YES / NO This equipment complies with SEMI E4 (SEMI Equipment
Communications Standard 1 Message Transfer (SECS I))
YES / NO This equipment complies with SEMI E37 and E37.1, High-Speed SECS
Message Services, Single Session (HSMS-SS)
YES / NO Network
YES / NO Other
YES / NO This equipment complies with SEMI E5 (SEMI Equipment
Communications Standard Message 2 Content (SECS II)).
YES / NO Message sequences conform to the recommendations of SEMI E30
The following capabilities scenarios are implemented on this equipment:
YES / NO establish communications
YES / NO data collection
YES / NO alarm management
YES / NO remote control
YES / NO process program management
YES / NO material movement
YES / NO equipment terminal services
YES / NO error messages
YES / NO clock
YES / NO spooling
YES / NO log file
YES / NO additional
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SUSS / PA300 / User Manual / M10-121841-00 / February 2002
3.5 Shipping and Receiving Requirements
3.5.1 Equipment Data Information
Environmental Requirements Operate Standby
Ambient Temperature (°C) 5 - 40 N/A
Ambient Humidity (%r.H.) 40 - 60 N/A
Pollution Degree
Grade 1 as per 1 IEC 664 N/A
Clean Room Class Class 6 as per DIN EN ISO 14664-1 N/A
3.5.2 Packaging
Length
(mm)
Width
(mm)
Height
(mm)
Net
Weight
(kg)
Gross
Weight
(kg)
System box
1230 1200 1120 498 607
Table with palette 1050 1000 850 97 102
Accessories 800 1200 800 - approx. 80
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
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4 Main Components of the System
4.1 Typical System Data
Set screw
Levelling screw
* the gap will be 2 mm if your system is equipped for HF or doubleside measurements or with a thermo chuck
Platen
Chuck
1 mm gap*
optional
measuring
units
Pa300 with table
Monitor
Electronics
Keyboard,
mouse &
panel
Front view
Top view Pa300
200
600* 600*
800
*For installation only
Cable
connection
location
Table: W x D x H
= 800 x 800 x 750 mm