SussPA300UserGuide.pdf - 第59页
58 SUSS / PA300 / User Manual / M10-121841-00 / February 2002 By following the guidelines set out in this manual injuries to personnel can be minimized and damage to the system and materials prevented. 4. Guidelines in U…
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
57
11 Health Hazard Analysis
11.1 Process Health Hazard Analysis
11.1.1 Use of Instruments
The semi-automatic prober PA300 is designed as a lab instrument according to DIN
EN 61 010 T1: 1994-03.
It is intended for use on industrial processes and laboratory applications.
As an electro-mechanical tool together with measurement instruments, it is used for
testing and probing wafers.
It’s specific task is the postitioning of probe needles in contact with semiconductor
structures.
It is assumed that the operator and service personnel are properly trained and that
they are periodically retrained for unexpected hazards.
As a lab instrument the PA300 prober should provide for universal set up and
applications.
11.1.2 Safety Conception
Mechanics
1. Normal Operation
After opening the loading lid during normal operation, the x-y stage will come to
a standstill in order to avoid the risk of injury to the operator. The control panel
should be kept separate to the PA300 operating area. There should be no
other potential risks during this type of operation.
During the application operation, handling creates no further hazards. Openings
to moving parts can only be reached via the loading lid with interlock.
Moving parts are potentially hazardous to the operator but can only be touched
when not in application operation. It should be noted that materials outside the
device can also be effected e.g. when unloading and positioning the wafer.
Unintentional touching has been reduced to a minimum but conscious access
to the chuck and the probecard area have been left.
2. Alignment Area
Parts which move quickly and with force towards a mechanical stop are protected
by screw on covers (e.g. x-y stage). The motorized microscope and probe
head motions are slow. They sit outside the operating area and do not run to a
stop. Openings caused by unused parts (e.g. the probecard) stay open as
during normal operation access is not needed.
3. Further Risks
Further risks for untrained personnel are relatively low.
The emergency OFF function is set according to Stop-Category 0: a complete
standstill is carried out through the immediate shutting off of the energy sources.
The emergency OFF function should always be used in the case of an
emergency. It can also be set to protect the measuring device against
programming errors. Control errors may affect the mechanics but the OFF
function prevents damage to the system and to the test objects by effecting an
immediate standstill.
58
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
By following the guidelines set out in this manual injuries to personnel can be
minimized and damage to the system and materials prevented.
4. Guidelines in User Information
Safety instructions can be found in the appropriate chapters of this manual.
Following these will help to minimize danger.
11.2 Electronics
11.2.1 Basic Design
The electrical equipment contains a separate control panel which is connected with a
line cord to 230V 1 phase AC. This control panel is protection class 1. The PA300
prober is supplied with a safety low voltage of <30V.It is connected via a earth wire to
the control panel. The EMO supply voltage is separate and fulfils the requirements of
a safety low voltage smaller than 30V AC. There are no special risks.
11.2.2 Guidelines for Electronics in the User Information
The accident prevention guidelines for electrical and operational facilities should be
taken into consideration. The user has to ensure that the electrical and operational
facilities are periodically tested.
11.3 Radiation
Standard configuration produces no special risks in terms of radiation.
For possible HF interference from outside guidelines are given, but the operation should
not be influenced.
11.4 Earthquake Safety
Earthquake protection for the PA300 consists of interlocking coupling between the
table and the prober.
11.5 Total Risk Evaluation
The chances of injury have been reduced as they are dependent on several events
occurring at the same time:
• Irresponsible behaviour of the operator
• Accidental motion in the danger area
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
59
12 Warranty and Limitations
In general, SUSS probe stations carry a one year warranty covering labor, material
and workmanship. This warranty does vary however for different types of probers as
well as for different areas of the world. Please review the specific warranty terms
outlined in your quotation for particulars pertaining to your equipment or the SUSS
general delivery terms and conditions. Please also refer to the specific purchasing
contract.
12.1 Scope
This warranty is limited to:
1. Equipment unpacked and installed by a SUSS representative unless other
conditions are agreed to by both parties and are set forth in writing.
2. Equipment used and operated in accordance with the User’s Manual.
3. Regular maintenance of the probe station (please refer to the User Manual)is
assumed for guarantee claims.
This warranty excludes:
1. Damage during shipment. Claims must be presented as determined by local
practice and dealt with via the SUSS appointed carrier and his insurance company.
2. Any items that are subject to normal wear and tear during the operation of the
equipment, such as probe needles or rubber gaskets.
All implied warranties, including warranties of use and fitness for a particular purpose
are limited in duration to the length of this warranty, unless otherwise provided by state
law. The warranty for additional equipment installed on a SUSS probe station is the
same as the original deliverer warranty.
The liability of SUSS MicroTec Test Systems GmbH is limited to the repair or
replacement, at our option, of any defective product and shall in no event include
incidental or consequential commercial damages of any kind.
12.2 Who is Protected
This warranty is offered only to the original purchaser of the equipment and on the
premises of the original dispatchment. Movement of the equipment to another premises,
especially over country borders, will lead to the invalidity of the guarantee claims.