4OM-1054-002.pdf - 第31页

Fig. 4A17 X/Y T able Section 1.3 Maintenance Spots 021 1-004 1-18 AGS01ETRP

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(7) X/Y Table Section
1.3 Maintenance Spots
0211-004 1-17 AGS01ETRP
Fig. 4A16
Fig. 4A17 X/Y Table Section
1.3 Maintenance Spots
0211-004 1-18 AGS01ETRP
(8) Light Source Device for Component Recognition
1.3 Maintenance Spots
0211-004 1-19 AGS01ETRP
Fig. 4A18
Fig. 4A19