DFD6361-Maintenance.pdf - 第205页

B-133 Procedur es for s etting moni tor v alue of d eioniz ed water pressure (Contin ued) Step No. Do This 5 Press the <F6> button on the MACHINE MAINTENANCE screen [scr een 6.0]. - The SENSOR THRESHOLD DATA screen…

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B-132
Procedures for setting monitor value of deionized water pressure
Step No. Do This
2
Make sure that the current supply reading of the deionized water
pressure is approximately 0.3MPa.
ÿ
Deionized water pressure sensor
3
Press the <F6> button on the MAIN MENU screen [screen 0.0].
- PASSWORD screen is called up.
4
Type the user password and press the <ENTER> button.
- The MACHINE MAINTENANCE screen [screen 6.0] is called
up.
B-133
Procedures for setting monitor value of deionized water pressure (Continued)
Step No. Do This
5
Press the <F6> button on the MACHINE MAINTENANCE
screen [screen 6.0].
- The SENSOR THRESHOLD DATA screen [screen 6.6] is
called up.
6
Set "0.150MPa" as the lower limit of deionized water pressure,
and then press the <ENTER> button.
- The machine updates the data.
7
Reinstall the cover [U].
B-134
4-5. Setting a Monitor Value of Vacuum Pressure
DFD6351 and DFD6361's control mechanism for the vacuum pressures
Among the five vacuum lines of DFD6351 and DFD6361, the following four
line excluding the spinner table vacuum use a mechanism to save air
consumption.
- Chuck table workpiece vacuum
- Chuck table vacuum
- Upper arm vacuum
- Lower arm vacuum
In the vacuum lines of traditional models, the air is supplied to the ejector all
the while vacuum operation is performed.
DFD6351 and DFD6361, however, continuously monitors the changes in the
vacuum pressure and the air is supplied to the ejector only when the vacuum
pressure drops to or lower than a threshold.
Therefore, it is necessary to set three thresholds for each vacuum line, such as
"target pressure", "pressure to resume vacuuming" and "lower limit".
Vacuum pressure
Time
C:Lower limit
(If below, vacuum error will occur.)
A:Target pressure
Time or period when air is
supplied to the ejector
Changes of vacuum pressure
B:Pressure to resume vacuuming
Pressure sensor of the chuck table vacuum
The chuck table section has two vacuum lines. One is the chuck table vacuum
to secure the chuck table itself on the θ-axis table, and the other is the chuck
table workpiece vacuum to absorb a workpiece to the chuck table.
Each of the vacuum lines consists of one ejector and two pressure sensors.
Sensor Name Function
Workpiece vacuum sensor Detects whether a workpiece exists on the
chuck table.
Table vacuum sensor Controls the air-saving mechanism.