DFD6361-Maintenance.pdf - 第397页

D-112 A0537 : Angle betw een channels err or . Error c ode A0537 Message Angle bet ween c hannel s er ror . W hat wa s detected The θ -axis ro tation be tween each channel exc eeded the specified v alue in the colum n &l…

100%1 / 720
D-111
A0536 : Index check X position error. (X)
Error code
A0536
Message
Index check X position error. (X)
What was
detected
In searching a pattern during X-direction movement in index checkout, the
Y-coordinate exceeded the preset value in the column <INDEX CHECK:
PERMISSION> on the ALIGNMENT DATA screen [screen 3.1.3].
During what
operation it
occurred
During X-direction movement in index checkout of auto alignment
operation.
State after
detection
Auto alignment operation is temporarily halted.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
frequently.
The value specified
in the column
<INDEX CHECK:
PERMISSION> on
the ALIGNMENT
DATA screen [screen
3.1.3] is too small.
Correct the value
specified in the
column <INDEX
CHECK:
PERMISSION> on
the ALIGNMENT
DATA screen
[screen 3.1.3].
Recovery
(1) Cancel the alarm, then the ERROR RECOVERY (ALIGNMENT)
screen is displayed.
(2) Perform the error recovery steps indicated on the screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-112
A0537 :Angle between channels error.
Error code
A0537
Message
Angle between channels error.
What was
detected
The θ-axis rotation between each channel exceeded the specified value in
the column < θ PERMISSION CH TO CH> on the ALIGNMENT DATA
screen [screen 5.3.4]
During what
operation it
occurred
During the operation of θ-axis rotation for automatic alignment.
State after
detection
Auto alignment operation is discontinued.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
frequently.
The value specified
in the column <θ
PERMISSION CH
TO CH> on the
ALIGNMENT
DATA screen [screen
5.3.4] is too small.
Correct the value
specified in the
column <θ
PERMISSION CH
TO CH> on the
ALIGNMENT
DATA screen
[screen 5.3.4].
Recovery
(1) Cancel the alarm, then the ERROR RECOVERY (ALIGNMENT)
screen is displayed.
(2) Perform the error recovery steps indicated on the screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-113
A0538 : θ adjustment retry over.
Error code
A0538
Message
θ adjustment retry over.
What was
detected
The error was displayed when the θ alignment was not achieved although
realignment was attempted the number of times specified in the column
<RETRY COUNT> on theALIGNMENT DATA screen [screen 3.1.3].
During what
operation it
occurred
During auto alignment operation.
State after
detection
Auto alignment operation is temporarily halted.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
frequently.
The value specified
in the column <θ
ADJUST
PERMISSION> on
the ALIGNMENT
DATA screen [screen
3.1.3] is too small.
Correct the value
specified in the
column <θ
ADJUST
PERMISSION> on
the ALIGNMENT
DATA screen
[screen 3.1.3].
The value specified
in the column
[RETRY COUNT]
on the ALIGNMENT
DATA screen [screen
3.1.3] is too small.
Correct the value
specified in the
column [RETRY
COUNT] on the
ALIGNMENT
DATA screen
[screen 3.1.3].
Recovery
(1) Cancel the alarm, then the ERROR RECOVERY (ALIGNMENT)
screen is displayed.
(2) Perform the error recovery steps indicated on the screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear