DFD6361-Maintenance.pdf - 第335页

D-50 2-4. Remedi es for Blade/Setup-Relate d Errors B0023 : Spindl e contin uity er ror. Error c ode B0023 Message Spi ndle conti nuit y er ror . W hat wa s detected There w as no cont inuity when the continuity was te s…

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D-49
E1035 : Water flow of S/T cleaning water dropped.
Error code
E1035
Message
Water flow of S/T cleaning water dropped.
What was
detected
When the flow rate of spinner cleaning water is lower than the flow
rate sensor set value during spinner cleaning.
During what
operation it
occurred
During spinner cleaning.
State after
detection
The cleaning operation stops. The nozzle axis moves to its origin.
The spinner table moves upward.
Phenomenon Probable causes Remedy Reference
What to do
Flow rate is
normal but an
error occurs.
The flow rate sensor
wiring is broken.
Contact your
nearest DISCO
Service Office.
The flow rate sensor
is defective.
Replace the sensor.
The flow rate sensor
setting is too high.
Correct the sensor
setting.
Recovery
(1) Cancel the alarm, and then the ERROR RECOVERY (CLEANING)
screen is displayed.
(2) Perform the error recovery steps indicated on the screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-50
2-4. Remedies for Blade/Setup-Related Errors
B0023 : Spindle continuity error.
Error code
B0023
Message
Spindle continuity error.
What was
detected
There was no continuity when the continuity was tested between the spindle
axis and chuck table before setup operation.
During what
operation it
occurred
Before the contact setup process.
State after
detection
The setup process is discontinued.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
even after the setup
process is selected
again.
The carbon brush is
worn.
Replace the carbon
brush.
F-1-4
The wiring between
the SETUP board
and chuck table or
between the SETUP
board and spindle
section is shorted.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm.
(2) Select the setup process again.
If the error recurs, it is conceivable that the spindle carbon brush may be
worn.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-51
B0031 : Setup data error.
Error code
B0031
Message
Setup data error.
What was
detected
An attempt was made to initiate cutting although the setup process was not
completed.
During what
operation it
occurred
At the beginning of cutting.
State after
detection
No cutting operation can be initiated.
Phenomenon Probable causes Remedy Reference
What to do
An error occurred
when the power
was turned ON, and
for that reason, the
last setup data was
erased.
The battery of the
CPU board may be
exhausted.
1. Conduct setup.
2. The battery will
be charged by
about 70-hour
normal operation.
If the error still
occurs frequently,
the battery is at the
end of its life.
Contact your
nearest Disco
Service Office.
Recovery
(1) Cancel the alarm.
(2) Cancel the cutting operation and perform the setup process.
(3) After the setup process is normally ended, resume the cutting operation.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear