DFD6361-Maintenance.pdf - 第334页

D-49 E1035 : W ater flow of S/T cleani ng water droppe d. Error c ode E1035 Message Water flow of S/T cl eaning w ater dropped. W hat wa s detected When the flow rate of spinner c leaning water is lower than the flow rat…

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D-48
E1034 : Clean air pressure of S/T cleaning water dropped.
Error code
E1034
Optional accessory
Message
Clean air pressure of S/T cleaning water dropped.
What was
detected
In the machine incorporating the specification of the spinner atomizing
nozzle as an optional accessory, the clean airpressure declines to under the
lower limit set at [Atomizing clean air pressure] on the SENSOR
THRESHOLD DATA screen [screen 6.6].
During what
operation it
occurred
During spinner cleaning.
State after
detection
The cleaning operation will stop. The nozzle axis moves to its origin
position. The spinner table moves up.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
even when the
clean airpressure is
proper.
The wiring of the
pressure sensor is
broken.
Contact your
nearest DISCO
Service Office.
The sensor is
defective.
Replace the sensor.
The setting value of
the [Atomizing clean
air pressure] is too
high.
Correct the value.
Recovery
(1) Cancel the alarm.
(2) Press the <Sensor> button to call up the SENSOR STATUS screen.
(3) Make sure that the flow rate of "ATOMIZING CLEAN AIR
PRESSURE" on the <PRES> Page.
(4) Resume the cleaning operation.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-49
E1035 : Water flow of S/T cleaning water dropped.
Error code
E1035
Message
Water flow of S/T cleaning water dropped.
What was
detected
When the flow rate of spinner cleaning water is lower than the flow
rate sensor set value during spinner cleaning.
During what
operation it
occurred
During spinner cleaning.
State after
detection
The cleaning operation stops. The nozzle axis moves to its origin.
The spinner table moves upward.
Phenomenon Probable causes Remedy Reference
What to do
Flow rate is
normal but an
error occurs.
The flow rate sensor
wiring is broken.
Contact your
nearest DISCO
Service Office.
The flow rate sensor
is defective.
Replace the sensor.
The flow rate sensor
setting is too high.
Correct the sensor
setting.
Recovery
(1) Cancel the alarm, and then the ERROR RECOVERY (CLEANING)
screen is displayed.
(2) Perform the error recovery steps indicated on the screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-50
2-4. Remedies for Blade/Setup-Related Errors
B0023 : Spindle continuity error.
Error code
B0023
Message
Spindle continuity error.
What was
detected
There was no continuity when the continuity was tested between the spindle
axis and chuck table before setup operation.
During what
operation it
occurred
Before the contact setup process.
State after
detection
The setup process is discontinued.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
even after the setup
process is selected
again.
The carbon brush is
worn.
Replace the carbon
brush.
F-1-4
The wiring between
the SETUP board
and chuck table or
between the SETUP
board and spindle
section is shorted.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm.
(2) Select the setup process again.
If the error recurs, it is conceivable that the spindle carbon brush may be
worn.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear