DFD6361-Maintenance.pdf - 第287页
D-2 1. Remedies for Problems Invoking No Error Code Indication - Problems at Power ON - Summary of this sectio n The problems that invoke no error code indicatio n usually occur when turning ON the power. These err ors c…
D-1
D. TROUBLESHOOTING
Contents of this chapter
This chapter describes the causes, check points and remedies for the problems
that occur when turning ON the power or during machine operation and the
errors caused by the improper operation.
Section No. Title Contents
1 Remedies for Problems
Invoking No Error Code
Indication
- Problems at
Power ON -
- Check points for the problems
that occur at power-on
- Remedies for the problems that
occur at power-on
2 Remedies for Problems
Invoking Error Code
Indication
-Causesoftheerrorofwhich
error code is displayed when an
improper operation is performed
or in the event of failure during
machine operation
- Remedies for errors
Safety precautions to be observed during troubleshooting
In troubleshooting, observe the following safety precautions.
WARNING
- Troubleshooting must be carried out by qualified maintenance
personnel who have received maintenance training. While a
maintenance task is being performed, no one other than the
maintenance personnel must touch the machine.
- If you attempt to replace parts with the power left ON, you may
receive an electric shock or get your body caught by a drive section,
which may result in serious injury or death.
Before replacing any defective part, be sure to turn OFF the facility
power supply.
CAUTION
- While the machine is serviced, be sure that the power, air, N
2
or
water supply is not turned ON/OFF by irrelevant persons.
Special care must be taken particularly when the machine shares
the same facilities with other equipment.
- Use the digital tester for the measuring instrument. Do not use the
megohm tester.
D-2
1. Remedies for Problems Invoking No Error
Code Indication - Problems at Power ON -
Summary of this section
The problems that invoke no error code indication usually occur when turning
ON the power. These errors can be classified by the trouble arising section and
there are, in some cases, more than one causes for one error.
This section describes the causes, check points and remedies for the problems
arisen when turning ON the power.
Section No. Title Contents
1-1 Main Circuit Breaker
Problems
- Remedies for the problem when
the main circuit breaker does not
turn ON
1-2 Main Power Supply
Problems
- Remedies for the problem
related to the main switch
1-3 POWER Lamp (Power-
On Lamp) Problems
- Remedies for the problem when
the POWER lamp does not light
1-4 Touch Panel Problems - Remedies for the problem when
the touch panel displays nothing
1-5 Microscope Light Source
Problems
- Remedies for the problem when
the halogen lamp in the light
source box does not light
1-6 EMO Switch Problems - Remedies for the problem that
the power does not turn OFF by
the EMO switch
D-3
1-1. Main Circuit Breaker Problems
Handling main circuit breaker problems
The causes, check points, judgment and remedies for the main circuit breaker problems are as described below.
Problem Cause What and how to check Judgment Remedy
Maintenance
personnel level
Hazard
level
Measuring
instruments, tools or
replacement parts
Protective
gear
The main
circuit breaker
lever goes
down to the
"trip" position
even after the
main circuit
breaker is
turned ON.
The circuit is
shortened.
Turn OFF the facility
power source. Then
check the interphase
resistance of the cable of
the main circuit breaker
secondary side as well as
the resistance between
each phase and PE.
If any measured
resistance is 0 Ω,
the power supply
line may be
abnormal.
If other than 0 Ω,
the main circuit
breaker may be
faulty.
Contact your
nearest
DISCO
office.
DISCO
engineer
Digital tester