DFD6361-Maintenance.pdf - 第687页
F-117 5-3-2. Prep aration of replacing the UV irradiation lamp Procedur es for prep aration of re placing th e UV irr adiation lam p Step No. Do This (Continued from the previous section) 1 Retrieve the following compone…
F-116
5-3-1. Shutting off power
Procedures for shutting off power
Step No. Do This
1
Press the <System Initial> button to effect system initialization.
- Each axis moves to its origin position.
2
Turn OFF the main switch and then pull out the key.
3
Turn OFF the circuit breaker at the left of the machine. Lock out
the circuit breaker lever with a padlock or the like.
4
Shut off the facility power supply.
Continued in the next section.
F-117
5-3-2. Preparation of replacing the UV irradiation lamp
Procedures for preparation of replacing the UV irradiation lamp
Step No. Do This
(Continued from the previous section)
1
Retrieve the following components from under the cassette stage.
- Inspection plate
- Irradiation shield plate
About removal procedures for the above components;
See the section B-3-7-2, [Replacing the irradiation shield
plate]
2
Lift the front edge of the glass plate and detach it from the pen
cylinder.
Pen cylinder
Glass plate
3
Pull out the glass plate toward you from the inspection workpiece
window.
Glass Plate
Continued in the next section.
F-118
5-3-3. Replacing the UV irradiation lamp
Procedures for replacing the UV irradiation lamp
Step No. Do This
(Continued from the previous section)
1
Unscrew the UV irradiation lamp.
- The ten of UV irradiation lamps are mounted in the UV
irradiation unit.
Removing the UV lamp
UV irradiation lamp assembly
Lamp sockets
Part Name Qty Part No.
Black light
(fluorescent lamp)
1 AQFL15BL-B