00198152-02_OM_VirtualInkspotHandling_for_SSW7xx_EN.pdf - 第22页
Virtual Inkspot Handling for SSW 7xx / Operating Manual 10/2017 Edition 22 isk is a very old 605 form at no longer supported. I t is slightly differen t from the 605 format. Figure 5-11: isk file format Example: Wafer fi…
Virtual Inkspot Handling for SSW 7xx / Operating Manual 10/2017 Edition
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► Configure the VIH file folder and format used to omit panels in the VIH tab.
Example: old 605 format with geometric determination of rows and columns
This behavior is exactly how the machine would interpret the panel zero points:
Figure 5-9: Mapping – Geometric
Example: 605 format but with row / column determination via the suffix of panel names
(Naming convention)
This format gives the data preparation engineer more flexibility because whatever panel has the
ending e.g. _1_2 will be treated as row 1 column 2:
Figure 5-10: Mapping – Naming convention
Virtual Inkspot Handling for SSW 7xx / Operating Manual 10/2017 Edition
22
isk is a very old 605 format no longer supported. It is slightly different from the 605 format.
Figure 5-11: isk file format
Example: Wafer file format
Figure 5-12: Wafer file format
Virtual Inkspot Handling for SSW 7xx / Operating Manual 10/2017 Edition
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Meaning of the VIH data processing if enabled or disabled:
Figure 5-13: VIH data processing
► Check the VIH data processing via the VIH data file.
Figure 5-14: Checking VIH data file