Utah-94-721002-System-Manual.pdf - 第11页

QCF 89 Issue 6 Page 3 of 4 Please tick appropriate box YES NO Detail 15. Have the rotary pump exhau st lines been conne cted to an exhaust extraction system that meets all local safety standards? 16. If the system is fit…

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QCF 89 Issue 6
Page 2 of 4
Please tick appropriate box YES NO Detail
7. Has AC power been connected to the system? Measure the voltages
between each phase and neutral.
Phase 1 to
Neutral
Phase 2 to
Neutral
Phase 3 to
Neutral
8. Has compressed air been connected to the system? Inlet pressure
must be 6 Bar (90PSI). Note Pressure.
Compressed Air Inlet Pressure
9. Has cooling water been connected to the system? Differential
pressure between inlet and outlet must be 3 - 4 Bar (45 – 60PSI). Water
supply should be connected to each inlet/outlet on the system in
parallel and not series. Note Inlet and Outlet Pressure.
Inlet Water
Pressure
Outlet
Water
Pressure
10. Has N2 vent been connected to the system? Inlet must be able to
maintain a pressure of 3 Bar (45psig). Note Pressure.
Vent Nitrogen Inlet Pressure
11. Has N2 purge been connected to the system? Inlet must be able to
maintain a pressure of 3 Bar (45psig). Note Pressure.
Purge Nitrogen Inlet Pressure
12. If the system is configured with cryogenic cooling, is an LN2 Dewar,
filled with LN2 available? Is the Dewar connected to the system via 3/8”
Swagelock connections and is the pipe work adequately insulated to
prevent a safety hazard?
Is the pipe work adequately
insulated to prevent a safety
hazard?
13. Have all of the gas pod connections been made to the appropriate
gas supply or system connection. Have they been leak checked?
Name
of Gas
Inlet
Pressure
Heated
?
Leak
Rate
Name
of Gas
Inlet
Pressure
Heated
?
Leak
Rate
Gas 1 Gas 7
Gas 2 Gas 8
Gas 3 Gas 9
Gas 4 Gas 10
Gas 5 Gas 11
14. All process gasses should be available for the system
commissioning. Please verify that each gas, as it is laid
out in the gas pod is connected, available for process and
that the gas line has been leak checked.
Please record the leak rate for each gas line. If there is
no line fitted please enter N/A.
Process gas inlet pressure should be set at 3 Bar (45psig).
Minimum acceptable inlet pressure: 2 Bar (30psig).
Maximum acceptable inlet pressure: 5 Bar (75psig).
If the gas line is to be used for BCl3, SiCl4 or TEOS, has
the gas line been wrapped with trace heater wire and
insulated? Failure to do so could result in condensation
of the gas, within the line during processing.
Gas 6 Gas 12
QCF 89 Issue 6
Page 3 of 4
Please tick appropriate box YES NO Detail
15. Have the rotary pump exhaust lines been connected to
an exhaust extraction system that meets all local safety
standards?
16. If the system is fitted with a cryo pump, which is used
for toxic gasses, has an action plan been discussed and
implemented for connection of the pump outlet
connector?
17. Has the rotary pump purge been connected to the
pumps and nitrogen supply?
18. Have the rotary pumps been filled with oil of the
correct type for the pump in use?
20. Is the gas pod extraction connected with a minimum
flow rate of 1m3/hour (6 line gas pod) or 3 m3/hour (12
line gas pod). Does the extraction system meet all local
safety regulations?
21. Do you believe that that demonstration of process
has been included in the purchase of your tool?
21.a. Please state, which processes require to be
demonstrated.
21.b. Are the required samples and measurement
equipment available for the process work to follow on
from hardware acceptance?
Name :
Position Within Company:
Signature:
Date: / /0
Preferred Date for Commissioning
Commencement:
/ /0
QCF 89 Issue 6
Page 4 of 4
Please return the completed form to
your nearest Oxford Instruments
Support Office, detailed below:
USA & Canada DE, NE, B, SE, FI,DK Eastern Territories U.K. and all Other Territories
Oxford Instruments America Inc Oxford Instruments GmbH Oxford Instruments Pte. Ltd Oxford Instruments Plasma
Technology
Plasma Technology Support Manager Plasma Technology Raymond Wong Global Support Manager
130A Baker Avenue Extension Postfach 4509 371 Beach Road North End
Concord 65035 Wiesbaden #02-07 Keypoint Yatton, Nr Bristol
MA 01742 Germany Singapore 199597 BS49 4AP. U.K.
Tel: (800) 447 4717 Tel: +49 6122 937161 Tel: +65 6337 6848 Tel: +44 1934 837070
Fax: (978) 369 8287 Fax: +49 6122 937175 Fax: +65 6337 6286 Fax: +44 1934 837071
Email:
CSG@ma.oxinst.com Email: Plasma@oxford.de Email: Raymond.Wong@oxford-instruments.com.sg Email: Support.PT@oxinst.co.uk
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