Utah-94-721002-System-Manual.pdf - 第127页

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~ =qÉÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉãNMM WARNING BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY . SKR= VQJNMMJPJQN`=f`m=NUM=ÅÜ~ãÄÉê=âáí=ïáíÜ=Ö~íÉ=î~äîÉ= W…

mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

The etch cleaning should be performed each time the aggregate of the deposition layers

reaches ~10 microns.

The recommended clean process is:

8% or 20%, 700mTorr, 200W, ≥30 minutes

This process is optimised for rapid electrode cleaning. If it is found that the cleaning rate of

the chamber walls is too slow with the above process, then a low pressure process can also be

used:

8% or 20%, 350mTorr, 200W, ≥ 30minutes

The two processes can be alternated until the chamber and electrodes are etched clean.

A chamber conditioning step (using the normal deposition conditions in the empty chamber

to deposit 0.2-0.5µm) is recommended before processing wafers.

Maintenance

UC Davis 94-721001 Issue 1: March 06 Page 6-8 of 22 Printed: 22-Mar-06, 7:41

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM

WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

SKR= VQJNMMJPJQN`=f`m=NUM=ÅÜ~ãÄÉê=âáí=ïáíÜ=Ö~íÉ=î~äîÉ=

WARNING

BEFORE ATTEMPTING ANY MAINTENANCE WORK ON THE PROCESS CHAMBER, IT

MUST BE SUBJECTED TO AT LEAST TWO VENT CYCLES SUBSEQUENT TO A

PROCESSING RUN.

SKRKN= jçåíÜäó=

1) Visually examine the interior of the chamber for contamination. Any necessary

cleaning should be carried out using a lint-free cloth moistened with Isopropyl

Alcohol (IPA). Tougher deposits can be removed using an abrasive pad first.

WARNING

ISOPROPYL ALCOHOL IS HIGHLY INFLAMMABLE (FLAMMABLE). DO NOT USE IT

NEAR A NAKED FLAME OR ENERGISED ELECTRICAL EQUIPMENT.

Examine the exterior of the chamber and its fittings for damage.

Examine the lid and seals for any damage or deterioration.

Examine the heating/cooling water flow system for signs of leakage.

Purge the process chamber for thirty minutes with dry nitrogen if IPA has been used for

cleaning.

Visually examine the top electrode for contamination. Any necessary cleaning should be

carried out using a lint-free cloth moistened with Isopropyl Alcohol (IPA).

Examine the top electrode and its integral gas and water fittings for damage.

Examine the seals for signs of deterioration.

SKRKO= lJêáåÖë=

The O-rings should be checked monthly but replaced as and when necessary.

Replacement O-rings should be constructed of Viton and pre-baked to 150°C to minimise the

risk of water vapour from the O-rings. The chamber lid O-ring should not need to be removed

unless it leaks. Clean the O-ring in situ using a lint-free cloth wetted with Isopropyl Alcohol.

To change the lid O-ring (use gloves):

1) Remove the O-ring, being careful not to damage the retaining groove.

2) Use a lint-free cloth and IPA to clean the O-ring sealing face on the chamber.

3) The new O-ring, cleaned with IPA, should be inserted with no twists. Stretch the O-

ring evenly as it is inserted to avoid local regions of stretching.

Maintenance

Printed: 22-Mar-06, 7:41 Page 6-9 of 22 UC Davis 94-721001 Issue 1: March 06

mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

SKS= qçé=ÉäÉÅíêçÇÉ==

WARNING

BEFORE ATTEMPTING ANY MAINTENANCE WORK ON THE PROCESS CHAMBER, IT

MUST BE SUBJECTED TO AT LEAST TWO VENT CYCLES SUBSEQUENT TO A

PROCESSING RUN.

SKSKN= jçåíÜäó=

1) Visually examine the top electrode for contamination. Any necessary cleaning should

be carried out using a lint-free cloth moistened with Isopropyl Alcohol (IPA).

WARNING

ISOPROPYL ALCOHOL IS HIGHLY INFLAMMABLE (FLAMMABLE). DO NOT USE IT

NEAR A NAKED FLAME OR ENERGISED ELECTRICAL EQUIPMENT.

2) Examine the top electrode and its integral gas and water fittings for damage.

Carefully inspect gas inlet showerhead plates for signs of plasma concentrating in a

hole and enlarging the hole.

3) Examine the seal for signs of incipient deterioration.

SKSKO= páñJãçåíÜäó=Eíççäë=ïáíÜ=~=êÉãçî~ÄäÉ=ëÜçïÉêÜÉ~ÇF=

Check the condition of the gas inlet isolation assembly for any signs of brown discoloration of

the white PTFE. (It goes brown sometimes before failing with a major enlargement of the

through-holes.)

SKSKP= ^ååì~ääó=Eíççäë=Ü~îáåÖ=~ÅÅÉëë=íç=íÜÉ=Ö~ë=áåäÉí=áëçä~íáçå=~ëëÉãÄäó=Ñêçã=

íÜÉ=íçé=ëáÇÉ=çåäóF=

Check the condition of the gas inlet isolation assembly for any signs of brown discoloration of

the white PTFE. (It goes brown sometimes before failing with a major enlargement of the

through-holes.)

Maintenance

UC Davis 94-721001 Issue 1: March 06 Page 6-10 of 22 Printed: 22-Mar-06, 7:41