Utah-94-721002-System-Manual.pdf - 第265页
Equipment Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä= f`m=NUM= WARNING BEFORE PROCEEDING WITH A NY MAINTENANCE WOR K, READ SECTION 1 - HEALTH AND SA FETY . T est Point TP 10 T est Point TP 1 1 0 RV1 P A RK P…
mä~ëã~ä~Ä=f`m=NUM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== Equipment Manual=
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
=
TKPKO= ^ìíçã~íÅÜ=ÖáîÉë=êÉÑäÉÅíÉÇ=éçïÉê=çÑ=OB=íç=RB=
1) Ensure that the automatch covers are securely fitted and that both Auto/Manual switches are
set to AUTO.
2) Switch on the ICP RF supply, then set the forward power to 500W.
3) Observe the reflected power. Adjust error signal potentiometer RV1 by about one turn each
way. The capacitors will adjust automatically in response: find the lowest reflected power
point.
4) Adjust error signal potentiometer RV2 by about one turn each way. The capacitors will adjust
automatically in response: find the lowest reflected power point.
5) Repeat Steps 3) and 4) until the best match in obtained; <2% reflected power should be
possible.
6) Increase the RF power to 1000W and if required, repeat Steps 3) to 5).
7) SAFETY Always measure the RF radiation during and after adjustments to the automatch.
ICP 180 Source
Issue 4: January 06 Page 24 of 26 Printed: 18-Jan-06, 8:44
Equipment Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä=f`m=NUM=
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
Test Point
TP 10
Test Point
TP 110
RV1 PARK
POTENTIOMETER
RV2 PARK
POTENTIOMETER
REAR VIEW
SIDE VIEW
Fig 6: Automatch components
ICP 180 Source
Printed: 18-Jan-06, 8:44 Page 25 of 26 Issue 4: January 06
Equipment Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä=f`m=NUM=
lfmq=äçÅ~íáçåë=ïçêäÇïáÇÉ
UK
Oxford Instruments Plasma Technolgy
North End, Yatton,
Bristol, BS49 4AP
Tel: +44(0)1934 837000
Fax: +44(0)1934 837001
Email:
plasma.technology@oxinst.co.uk
Web: www.oxford-
instruments.com/plmchp5.htm
USA
Oxford Instruments Inc.
130A Baker Avenue Extension
Concord, MA 01742
Tel: +1 978 369 9933
Toll Free +1 800-447-4717
Fax: +1 978 369 8287
Email:
info@ma.oxinst.com
Germany
Oxford Instruments GmbH
Otto-von-Guericke Ring 10,
D-65205 Wiesbaden
Tel: +49(0)6122 937161
Fax: +49(0)6122 937175
Email:
plasma@oxford.de
Japan
Oxford Instruments K.K.
2-11-6 Tomioka
Koto-ku, Tokyo 135-0047
Tel: +81-3-5245-3261
Fax: +81-3-5245-4466
Email:
oikkpt@oxinst.co.jp
Web: www.oxford-instruments.jp
People’s Republic of China (Beijing)
Oxford Instruments China
Room 714, Office Tower 3,
Henderson Center,
No. 18 Jianguomennei Ave,
Dongcheng District,
Beijing 100005
Tel: +86 106518 8160/1/2
Fax: +86 106518 8155
Email:
ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
People’s Republic of China
(Shanghai)
Oxford Instruments China
Room 14-F, No.1 Plaza
800 Nanjing East Road
Shanghai 200001
Tel: +86 216360 8530
Fax: +86 216360 8535
Email:
ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
Singapore
Oxford Instruments Pte. Ltd
371 Beach Road,
#02-07 Keypoint
Singapore 199597
Tel: +65 6337 6848
Fax: +65 6337 6286
Email:
oipt.sales@oxford-
instruments.com.sg
Taiwan
Oxford Instruments Overseas
Marketing Ltd.
1F, No 23 Jing-Shang 19
th
Street,
Hsinchu, Taiwan
Tel: +65 6337 6848
Fax: +65 6337 6286
Email:
oipt.sales@oxford-
instruments.com.sg
ICP 180 Source
Issue 4: January 06 Page 26 of 26 Printed: 18-Jan-06, 8:44