Utah-94-721002-System-Manual.pdf - 第273页

System Manual lñÑçêÇ=fåëí êìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== ^ää=lfmq=póëíÉãë OKQ= pÉåëÉ=~åÇ=Åçåíêçä=m`_= Refer to drawing 94-SE00A178 01 for a circuit diagram of the AMU. The layout of the Sense and Control PCB is shown in Fig…

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RF IN

RF OUT

DC BIAS

COIL

C2 PADDING

CAPACITORS

C1 PADDING

CAPACITORS

TO DC BIAS

CIRCUIT

TYPICAL MATCHING COMPONENTS

(LAYOUT 1)

RF IN RF OUT

ALTERNATIVE MATCHING COMPONENT LAYOUT

(LAYOUT 2)

NOTE: In some systems the circuit labels C1 and C2 are reversed.

Fig 3: Matching component layouts

OIPT Automatch Unit

Issue 6: February 05 Page 6 of 20 Printed: 5-Jan-06, 8:03

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== ^ää=lfmq=póëíÉãë

OKQ= pÉåëÉ=~åÇ=Åçåíêçä=m`_=

Refer to drawing 94-SE00A17801 for a circuit diagram of the AMU. The layout of the Sense

and Control PCB is shown in Fig 4 .

Fig 4: Sense and control PCB layout

OIPT Automatch Unit

Printed: 5-Jan-06, 8:03 Page 7 of 20 Issue 6: February 05

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WARNING

HAZARDOUS RF VOLTAGE - CONTACT CAN CAUSE DEATH, SEVERE INJURY

OR BURNS.

ANY WORK REQUIRING THE REMOVAL OF COVERS OR PANELS MUST

ONLY BE PERFORMED BY AUTHORISED PERSONNEL WHO ARE AWARE OF

THE HAZARDS INVOLVED.

NOTE: Detailed test instructions are contained in Oxford Instruments Plasma Technology

Work Instruction No. 39. The following is a summary for the benefit of skilled service

engineers. It should

not be necessary for operators to perform these setting up

operations.

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Set mechanical movement range

Confirm end-stop points

Find manual match

Set park positions

Set RV1 and RV2

Confirm auto-match for low power

operation

Confirm auto-match for high power

operation

Connect AMU to system

Set gain levels

Steps 1 to 5

Steps 1-8:

RF POWER

SUPPLY OFF

Step 6

Step 7

Step 8

Steps 9 to 12

Step 13

Step 14

Step 15

OIPT Automatch Unit

Issue 6: February 05 Page 8 of 20 Printed: 5-Jan-06, 8:03