Utah-94-721002-System-Manual.pdf - 第293页
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã ~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Issue 2: November 02 System Common Components pÉÅíáçå=M=J=póëíÉã=`çããçå=`çãéçåÉåíë= Section 0 - System Common Components …
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Illustrated Parts Catalogue
Issue 2: November 02
Page vi of vi
Printed: 16-Jan-06, 15:55
Interface PCB (inside door)
(see Sub-section 0.3)
REAR VIEW
PLC No. 2 (inside door)
(see Sub-section 0.4)
PLC No. 1 (inside door)
(see Sub-section 0.4)
Power bo
x
(see Sub-section 0.1)
Base of table
(see Section 5)
Helium pipe run
(see Sub-section 5.4)
Temperature controllers
(see Sub-section 0.8)
Penning unit
(see Sub section 7.1)
Pumping pipework
(see Sub section 8.2)
V
acuum interlock switch
(see Sub section 8.2)
Services panel
(see Sub-sections
0.5 - Pneumatics
0.6 - Nitrogen purge and
0.7 - Cooling water)
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Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 System Common Components
pÉÅíáçå=M=J=póëíÉã=`çããçå=`çãéçåÉåíë=
Section 0 - System Common Components ......................................................................................................1
100-0-RIE Base unit.............................................................................................................................................................2
0.1 Power box.............................................................................................................................................................2
0.2 Control panel .......................................................................................................................................................4
0.3 PCBs.......................................................................................................................................................................5
0.4 Programmable Logic Controllers (PLCs)..............................................................................................................6
0.5 Pneumatic control components...........................................................................................................................7
0.5 Pneumatic control components (continued)......................................................................................................8
0.6 Nitrogen purge line .............................................................................................................................................9
0.7 Water cooling circuits........................................................................................................................................10
0.8 Heating circuits ..................................................................................................................................................11
0.9 System common components option spares ....................................................................................................12
Printed: 16-Jan-06, 15:55
Section 0 Page 1 of 12
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Illustrated Parts Catalogue
Ef`m=NUMF=
System Common Components Issue 2: November 02
NMMJMJofb=_~ëÉ=ìåáí=
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24V, ± 15V
Power supply
unit
CB2
24V, ± 15V
Power supply
unit
CB 14
ICP
generator
CB12
Chamber
pump
CB8
Heater/
chiller
K4 - RF generator
K8 - ICP generator
(behind CB2)
K3
Blower
pump
K2
Roots
pump
CB1
Mains
IN
Mains
filter
K1
Mains
IN
Fan and
filter
F1, F2
& F3
fuses
(1)
(1)
(4)
(4)
(13)
(13 + 14)
(13 + 14)
(7)
(8)
(9)
(10)
(11)
(12)
(5)
CB 13
Load lock
pump
(13 + 15)
K6
Loadlock
pump
CB11
Pumpdown
heater
(2)
CB9
Heated
backing
valve
CB7
V
at valve
cont.
CB5
Turbo
cont.
(6) (4)(4)
CB10
Chamber
heater
CB6
Turbo
heater
CB4
RF
generator
(3)
(3)
(6)
Section 0 Page 2 of 12
Printed: 16-Jan-06, 15:55