Utah-94-721002-System-Manual.pdf - 第350页

mä~ëã~ä~Ä póëíÉã=NMM Ef`m=NUMF= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Wafer Handling Issue 2: November 02 Section 10 Page 4 of 6 Printed: 16-Jan-06, 15:55

100%1 / 362
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Wafer Handling
=
Item OIPT Part No. Qty Description
MA00A20102 1 LOADLOCK ASSY. 46 x 236 mm VAT VALVE
1 G/SUN/CAB/942 1 HAND KNOB (M6) DIA. 30 mm
2 MD00D20785 1 LOADLOCK PROTECTIVE WINDOW
3 MD00C17683 1 VIEW PORT CLAMP PLATE
4 MD90D12788 1 WINDOW GASKET
5 MD90D12789 1 WINDOW GLASS
6 MD00A21658 1 LOADLOCK HINGED LID
7 G/SEL/O-V/279C 1 3.5 x 329.8 mm VITON 'O' RING BS279C
8 G/VAC/FIT//927 1 ROTARY FEEDTHRO. (8 mm SHAFT)
9 MD00C17699 1 DRIVE PULLEY
10 G/SUN/BEL/013 1 S/S BELT 6.35W x 0.075THK x 731LG
11 G/SUN/BRG/904 1 MINIATURE LM GUIDE TYPE HRW 14
12 MD00D20183 4 PILLAR
13 MD91C17754 1 SUPPORT PLATE
14 MD00D180027 1 LOADLOCK PCB MOUNT
15 MD00A20103 1 LOADLOCK CHAMBER 46 x 236 mm VAT VALVE
16 G/SUN/BRG/903 1 MINIATURE LM GUIDE TYPE HRW 12
17 MD00B20814 1 LOADLOCK/VALVE INTERFACE 2-RINGS
18 G/SEL/O-V/263C 1 3.5 x 196.4 mm VITON 'O' RING BS263
19 G/SEL/O-V/269C 1 3.5 x 221.85 mm VITON 'O' RING 200-269
20 MD00D17695 1 LOWER FRONT PULLEY MOUNT
21 MD00D20146 1 END EFFECTOR PLATE 2.2. Kg S/ST
22 MD00C20145 1 END EFFECTOR 2.2. Kg S/ST RATE
23 MD00D17698 3 DRIVEN PULLEY
24 MD00D17744 1 LOWER CARRIAGE BELT CLAMP
25 MD00C20253 1 UPPER RAIL SUPPORT
26 MD00D17693 1 UPPER REAR PULLY MOUNT
27 G/SUN/BEL/012 1 S/S BELT 6.35W x 0.075THK x 641LG
28 MD00D17696 3 PULLEY BEARING CLAMP
29 MD00B21657 1 LOADLOCK TOP COVER
30 MD00D17701 1 LOWER CARRIAGE END STOP
31 MD00D23696 2 HINGE BLOCK
32 MD00C23711 2 LID - HINGE PIN FIXING
33 G/SEL/O-V/260C 1 3.5 x 164.7 mm VITON 'O' RING BS260C
* MA00Z17834 1 LOADLOCK MOTOR CONTROL ASSEMBLY
* G/SUN/GER/009C 1 SERVO MOTOR 24VDC RS.718-981
* EMM0025 1 PRECISION DC M/GEARBOX 640:1
* G/VAC/GGE//005 1 ACT. PIRANI GGE APG-L-NW16
* G/VAC/GGE/004 1 ACT. INVERT MAG GGE AIM-V-NW25
G/SEL/O-V/280C 1 3.5 x 355.2 mm VITON 'O' RING BS280 - NOT SHOWN - FITS
BETWEEN ITEMS 15 AND 28
G/SEL/O-V/264C 1 3.5. x 190.1 mm VITON 'O' RING BS264 - NOT SHOWN - FITS
BETWEEN ITEMS 15 AND 17
G/SUN/BRG/050 3 4 PNT CONT'T BRG 1" 'ID x 1.375' O/D - NOT SHOWN - FITS
ON EACH ITEM 22
MD00D17674 1 10 PIN SEAL BODY - NOT SHOWN
MD00D17702 1 UPPER CARRIAGE END STOP - NOT SHOWN
MD00D17745 1 UPPER CARRIAGE BELT CLAMP - NOT SHOWN
ESZ9017 1 MICROSWITCH 331-405 - NOT SHOWN
EIQ0055C 1 OPTO SENSOR SLOTTED TRW - NOT SHOWN
MD00D18027 1 MICROSWITCH PLUNGER - NOT SHOWN
MD00D18042 1 MICROSWITCH ACTUATOR - NOT SHOWN
MD91D17505 4 LOCATION PIN - NOT SHOWN
* SEE PHOTOGRAPH ON FOLLOWING PAGE
Printed: 16-Jan-06, 15:55
Section 10 Page 3 of 6
mä~ëã~ä~Ä póëíÉã=NMM
Ef`m=NUMF=
lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Wafer Handling Issue 2: November 02
Section 10 Page 4 of 6
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Wafer Handling
NMKO= t~ÑÉê=Ü~åÇäáåÖ=çéíáçå=ëé~êÉë==
OIPT Part No. Qty Description
COMMON SPARES, SINGLE WAFER AUTOMATIC INSERTION LOAD LOCK FOR USE
WITH ISOLATED PROCESS CHAMBER, INCLUDING SUPPORT FRAME AND ACTIVE
PIRANI GAUGE (100-10-5xxx)
G/SUN/BEL/012 1 S/S BELT 6.35W x 0.075THK x 641LG
ESZ9107 1 MICRO SWITCH 331-405
G/VAC/FIT/927 1 ROTARY FEEDTHROUGH (8 mm SHAFT)
G/SUN/GER/009 1 SERVO MOTOR 24 VDC
EMM0025 1 PRECISION DC M/GEAR
MA00Z17834 1 LOADLOCK MOTOR CONTROLLER PCB
G/SUN/BEL/013 1 S/S BELT 6.35W x 0.075THK x 731LG
EIQ055 1 OPTO SENSOR SLOTTED
G/VAC/GGE/005 1 ACTIVE PIRANI GAUGE APG
G/SUN/BRG/050 1 4 PNT CONT'T BRG 1" I/D x 1.375" O/D
AS ABOVE WITH LARGE MESC VALVE (100-10-05C)
G//SUN/BRG/903 1 MINIATURE LM GUIDE BEARING TYPE HRW12
G//SUN/BRG/904 1 MINIATURE LM GUIDE BEARING TYPE HRW14
G/SEL/O-V/269 1 3.5 x 221.85 mm VITON 'O' RING 200-269
PM KIT LOADLOCK HANDLER - STANDARD QUARTZ CLAMP TOOLING (100-10-05CS)
MD91B22328SP 1 4" DIA WAFER CLAMP QUARTZ
MD91B22277SP 1 3" DIA WAFER CLAMP QUARTZ
MD91B22327SP 1 2" DIA WAFER CLAMP QUARTZ
MD91B24693SP 1 5" DIA WAFER CLAMP QUARTZ
MD91B22329SP 1 6" DIA WAFER CLAMP QUARTZ
MD91B23036SP 1 8" DIA WAFER CLAMP QUARTZ
=
Printed: 16-Jan-06, 15:55
Section 10 Page 5 of 6