Utah-94-721002-System-Manual.pdf - 第213页

Installation Data = lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~Ä póëíÉãNMM UK= fåíÉêäçÅâë= There are two types of interlocks used on the =mä~ëã~ä~Ä póëíÉãNMM ; hardw are and software. In all areas, the hardware interlo…

mä~ëã~ä~ÄpóëíÉãNMM= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó Installation Data

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CAUTION

Where the rotary vane or Roots pumps are powered from a mains supply separate

from the mä~ëã~ä~ÄpóëíÉãNMM, a separate 'emergency off' facility must be provided

by the customer.

Available

pump options

Length

Width

Height

Machine

connection

*Pump

outlet

connection

Weight

Power

consumption

Minimum N

purge rate

Alcatel 2015C2 462 188 240 NW 25 NW 25 27 0.45 (50Hz)

0.55 (60Hz)

2 litres/minute

Alcatel 2033C2 701 213 348 DN 40 DN 40 76 1.1 (50Hz)

1.3 (60Hz)

2 litres/minute

Alcatel 2063C2 819 264 397 DN 40 DN 40 98 2.2 (50Hz)

2.6 (60Hz)

2 litres/minute

Alcatel ADP

122P

830 390 580 DN 50 DN 40 245 1.5 10 litres/minute

Alcatel

ADS602P

830 390 580 DN 100 DN 40 378 1.8 (50Hz)

2.0 (60Hz)

10 litres/minute

Alcatel ACP

28G

609 185 310 DN 25 ISO K-F 33.5 1.2 1.05

litres/minute

Alcatel RSV 301 880 510 1000 DN 40 DN 63 220 1.1 (50/60Hz) **2 litres/minute

* All fittings and pipework connected to the rotary pump exhaust must be made from industry standard stainless steel.

Refer to the OIPT Services Specifications document, sub-section 8.1.

** This figure applies only to the rotary vane pump; the roots blower does not require N

purging.

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The requirements for rotary pump purging depend on the process used. Customers should

consult the pump manufacturer for their recommendations.

For Alcatel 2033 and 2063 rotary pumps, the recommended minimum N

purge rate is

2 litres/minute at a pressure of 2bar to 5bar. For highly corrosive or pyrophoric gases,

4 litres/minute is recommended.

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Available

heater/chiller

options

Length

Width

Height

*Typical

operational

temperature

range

Water

connections

Weight

Electrical

requirements

Neslab RTE-7 445 235 600 0°C to +90°C ¼” Swagelok

fitted

28.6

230V 50Hz or 115V

60Hz, 12A single

phase

Betta-Tech

CU500

610 380 450 -10°C to +70°C ¼” Swagelok

fitted

240V 50Hz 8.5A or

110V 60Hz 15A,

single phase

*Standard control range, for other temperature ranges please consult the factory.

IMPORTANT: Heater/chillers should be filled/topped up with Hexid A40 coolant

(Oxford Plasma Technology Part No. G/WTR/SUN/007 for 15 litres). This

product is propylene glycol based and is pre-diluted ready for use.

Refer the OIPT ‘Services Specifications for Plasmalab and Ionfab

systems’ document, sub-section 2.1 for the warranty impact of not

using this product.

Installation Data (ICP 180)

Issue 5: June 05 Page 16 of 18 Printed: 22-Mar-06, 6:57

Installation Data= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~ÄpóëíÉãNMM

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There are two types of interlocks used on the=mä~ëã~ä~ÄpóëíÉãNMM; hardware and software.

In all areas, the hardware interlock will override any software interlock. The hardware

interlocks, and their effect on the system components in the case of an interlock becoming

open circuit are as follows:

The electrical interlocks are divided into two circuits controlling the power to the system.

1) The mains power connection is made to a system Power Distribution Unit. The Power

Distribution Unit will disable all of its power outputs under the following conditions:

a) If the Emergency Off button is pressed.

b) If there is an interruption of the power input to the system.

c) If the Power Distribution Unit external facility interlock sensor link becomes

open circuit.

NOTE:

The Power Distribution Unit external facility interlock sensor

link enables the interlocks of external sensors, e.g. gas

detectors, exhaust scrubbers, etc., to be monitored by the Power

Distribution Unit. External interlock contacts connected to this

link should be voltage free and Normally Closed, i.e. faulting to

an Open Circuit.

2) The system internal 24V supply, comprises a process line and a chamber line:

The 24V process line, which controls the process gases and plasma power supply

units, will be disabled under the following conditions:

a) If the Vacuum Safety Switch is open circuit, i.e. Chamber Pressure > 600

mbar.

b) If the load lock slit valve is OPEN.

The 24V chamber line will be disabled under the following conditions, leaving the system

controller operational, but disabling all system components:

a) If the Water Flow switch is not closed.

b) If the Chamber top is OPEN.

Installation Data (ICP 180)

Printed: 22-Mar-06, 6:57 Page 17 of 18 Issue 5: June 05

mä~ëã~ä~ÄpóëíÉãNMM= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó Installation Data

Emergency Off / Electrical

Fail

24V Process line 24V Chamber line

Interlock Fail Restore Fail Restore Fail Restore

System/Controller OFF Restart

Required

RF Generator OFF Powered, NOT

active

OFF Powered,

NOT active

OFF Powered,

NOT active

Process Gases OFF Powered, NOT

active

OFF Powered,

NOT active

OFF Powered,

NOT active

Automatic

Pressure

Controller Valve

CLOSED

CHANGE

CLOSED

Load lock

Slit Valve

HOLD

Pumps OFF Pumps must be

restarted

CHANGE

OFF Pumps must

be restarted

Table 2 - Consequences of open circuit interlocks

The other component specific interlocks are incorporated into the software controller,

alerting the operator of conditions such as low process gas flow, pump failure, etc. The

software also monitors the position of the wafer handling mechanisms, ensuring safe

operation.

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Oxford Instruments Plasma Technolgy

North End, Yatton,

Bristol, BS49 4AP

Tel: +44(0)1934 837000

Fax: +44(0)1934 837001

Email:

plasma.technology@oxinst.co.uk

Web: www.oxford-

instruments.com/plmchp5.htm

USA

Oxford Instruments Inc.

130A Baker Avenue Extension

Concord, MA 01742

Tel: +1 978 369 9933

Toll Free +1 800-447-4717

Fax: +1 978 369 8287

Email:

info@ma.oxinst.com

Germany

Oxford Instruments GmbH

Otto-von-Guericke Ring 10,

D-65205 Wiesbaden

Tel: +49(0)6122 937161

Fax: +49(0)6122 937175

Email:

plasma@oxford.de

Japan

Oxford Instruments K.K.

2-11-6 Tomioka

Koto-ku, Tokyo 135-0047

Tel: +81-3-5245-3261

Fax: +81-3-5245-4466

Email:

oikkpt@oxinst.co.jp

Web: www.oxford-instruments.jp

People’s Republic of China (Beijing)

Oxford Instruments China

Room 714, Office Tower 3,

Henderson Center,

No. 18 Jianguomennei Ave,

Dongcheng District,

Beijing 100005

Tel: +86 106518 8160/1/2

Fax: +86 106518 8155

Email:

ptsales@oichina.cn

Web: www.oxford-instruments.com.cn

People’s Republic of China

(Shanghai)

Oxford Instruments China

Room 14-F, No.1 Plaza

800 Nanjing East Road

Shanghai 200001

Tel: +86 216360 8530

Fax: +86 216360 8535

Email:

ptsales@oichina.cn

Web: www.oxford-instruments.com.cn

Singapore

Oxford Instruments Pte. Ltd

371 Beach Road,

#02-07 Keypoint

Singapore 199597

Tel: +65 6337 6848

Fax: +65 6337 6286

Email:

oipt.sales@oxford-

instruments.com.sg

Taiwan

Oxford Instruments Overseas

Marketing Ltd.

1F, No 23 Jing-Shang 19

Street,

Hsinchu, Taiwan

Tel: +65 6337 6848

Fax: +65 6337 6286

Email:

oipt.sales@oxford-

instruments.com.sg

Installation Data (ICP 180)

Issue 5: June 05 Page 18 of 18 Printed: 22-Mar-06, 6:57