Utah-94-721002-System-Manual.pdf - 第277页

System Manual lñÑçêÇ=fåëí êìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== ^ää=lfmq=póëíÉãë Drive C1 negative to the stop position; LED 102 lights; stop point in the range 000 - 050 Drive C2 positive to the stop position; LED 1 lights; stop …

^ää=lfmq=póëíÉãë lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

System

Type

Set C1

Then

move

Drive

Motor

Set C2

Then

Move

Drive

Motor

RIE/DP

Maximum

1 turn

Maximum

(999)

Maximum

1 turn

Maximum

(999)

ICP180

Maximum

1 turn

Maximum

(999)

Minimum

1 turn

Minimum

(000)

Ion Beam

Minimum

1 turn

Minimum

(000)

Minimum

1 turn

Minimum

(000)

ICP 380

Maximum

1 turn

Maximum

(999)

Maximum

7 Turns

Maximum

(999)

Padding

capacitor

mounting

position

Fig 5: Capacitor shafts rotation direction

To find the minimum position, turn the capacitor

shaft in the direction of the arrow, shown in Fig

To find the maximum position, turn the

capacitor shaft opposite to the direction of the

arrow in Fig 5.

At the minimum position, the shaft becomes

stiff; at the maximum position, the shaft

becomes loose. Do not try to turn the shaft

past these points. If when turning the

capacitor to the maximum position, the shaft

becomes loose, turn the shaft back in until it just

begins to bite, this is the maximum position.

For Vacuum Capacitor AMU (AMU board with capacitor range mod.):

(Applies to all system types) Rotate the vacuum capacitor shaft clockwise as you

look at it from the motor end (see Fig 5) until the shaft just becomes stiff, and then

turn in half a turn. Making sure the motors don’t mesh, drive both motors to

minimum (000).

6b) For gear driven capacitors: Re-mesh the gears and tighten motor retaining

screws, ensuring that the motor and capacitor positions don’t move.

For direct drive capacitors: Loosen the coupling clamp screw on the capacitor

side, turn the coupling on the capacitor side until it lines up wit that on the motor

side ensuring neither the capacitor nor the motor change position at any time. Clip

the coupling together and tighten the clamp screw. Then re-attach the motor plate.

7) Confirm the ‘end of range’ stop functions using the manual drive switches located

on the AMU panel:

Drive C1 positive to the stop position; LED 101 lights; stop point in the range 950-999

OIPT Automatch Unit

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System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== ^ää=lfmq=póëíÉãë

Drive C1 negative to the stop position; LED 102 lights; stop point in the range 000 -

050

Drive C2 positive to the stop position; LED 1 lights; stop point in the range 950-999

Drive C2 negative to the stop position; LED 2 lights; stop point in the range 000 - 050

If these aren’t working as stated, refer to section 5 or OIPT Work Instruction No. 39

8) Set LK2 and LK 102 to

position ‘b’, and then

turn RV1 and RV101 fully

clockwise until they

begin to click (see Fig 6

or Fig 4).

RV1LK2

JP3

LK102

RV101

Fig 6: Component locations

9) Fit all covers to the AMU ensuring that they are securely fitted and connect the RF

generator to the matching unit. Evacuate the process chamber and turn on a low

power process.

For a Plasmalab system, a suitable process would be:

RF Generator output: 50 W

Pressure: 50 mTorr (RIE), 1 Torr (PECVD), 0.1 Torr (PE)

Gas: 20-100 sccm air, nitrogen or argon.

For an ion beam system, a suitable process would be:

RF generator output: 150 W (3 cm to 5 cm diameter)

300 W (15 cm to 20 cm diameter)

Gas: 10 sccm Argon

It may be necessary to use a gas burst to start the plasma, and it may be

necessary to start the neutralizer, if fitted.

OIPT Automatch Unit

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^ää=lfmq=póëíÉãë lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

10) Manually match to the lowest possible reflected power using the AMU control

panel, and make sure a plasma is running. Adjust the error signal zero

potentiometers RV1 and RV2 (located on the same side of the AMU as the RF in

connector; see Fig 1), while monitoring the two error signals on JP3 pins 1 and 3 (See

Fig 6). These should be less than 20 mV when a match exists. Amplified error signals

are accessible at TP 10 and TP 110; these should be made as low as possible when the

RF is well matched.

For Vacuum Capacitor AMU (AMU board REV05 and earlier):

If it is not possible to find a match position due to the match position being beyond

the range of the capacitors, stop the process and remove the AMU cover again. If C1

is attempting to drive above the maximum position, add 180 pF padding capacitor

(Part Number 94-ECC1218), or turn 2 turns anti-clockwise towards maximum. If C1 is

attempting to drive past the minimum position, remove a padding capacitor if

already fitted, otherwise turn 2 turns clockwise towards minimum. If C2 attempts to

drive above the maximum position turn 2 turns anti-clockwise, if C2 attempts to

drive below the minimum position, turn 2 turns clockwise. Whilst doing this, be

careful not to turn the capacitors beyond their physical end stops.

For Vacuum Capacitor AMU (AMU board with capacitor range mod.):

If C1 attempts to drive above maximum position, add 180 pF padding capacitor. If C1

is attempting to drive past the minimum position, remove a padding capacitor if

already fitted. If C2 attempts to drive past maximum or minimum position, check

that the correct inductor is fitted and that the capacitors are correctly fitted to the

system. If these are correct, the match position is out of the range of C2.

For Air Vane Capacitor AMU:

If C1 or C2 attempts to drive above maximum position, add 180 pF padding

capacitor. If C1 or C2 is attempting to drive past the minimum position, remove a

padding capacitor if already fitted. It is not necessary to reset the positions of the Air

Vane Capacitors.

11) Increase the RF power in a few steps to maximum and check for RF leakage, arcing

or local overheating.

12) Rematch manually, when at maximum RF power, manually to less than 1% reflected

power if possible; less than 3% is the maximum reflected power acceptable. Refine

the zero settings of the error signals.

13) Make a note of the capacitor position values when a good match is achieved. Stop

the process and adjust the park positions to a value below that of the match position

(within around 050 units on the position display), making sure that C2 is closer to its

match position than C1.

Re-start the process with the AMU controller in auto to make sure the match is

successful. If there is a large reflected power, repeat Step 10. If there is a small

amount of reflected power, which can’t be reduced manually, RV1 and RV2 on the

side of the AMU can be used to make finer adjustments when in auto mode.

14) If the capacitors oscillate when in auto, reduce the gain of the control circuit by

slowly turning RV1 and RV101 anti-clockwise (if C2 oscillates adjust RV1, if C1

oscillates adjust RV101) until oscillations stop. If the potentiometer’s RV1 or RV101

begin to click before the oscillations have ceased, turn them fully clockwise until

they begin to click again and change LK2 (corresponding to RV1) or LK102

OIPT Automatch Unit

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