Utah-94-721002-System-Manual.pdf - 第261页
Equipment Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä= f`m=NUM= WARNING BEFORE PROCEEDING WITH A NY MAINTENANCE WOR K, READ SECTION 1 - HEALTH AND SA FETY . TK= qêçìÄäÉëÜççíáåÖ= TKN= `ìëíç ãÉê=pìééçêí=c~Åáäáí…
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WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
=
Procedure
1) Clean and pump the process chamber as recommended above
2) Vent the chamber
3) If an endpoint camera is fitted, remove the camera
4) Remove the outer cover of the ICP180
5) Disconnect the ¼ inch VCR joint feeding gas into the top of the ICP180
6) Free the water cooling tubes or turn off the water and disconnect the tubes to allow the
ICP180 top vacuum lid to be removed
7) Undo the 6 bolts securing the top vacuum lid and remove the lid, exposing the dielectric tube
8) It will probably be necessary to open one or more of the inner RF shielding panels to gain
access to the cooling clamps at the top and bottom of the ICP dielectric tube. Slacken the
cooling clamps until it is possible to withdraw the old ICP tube.
Notes:
a) The tube may stick to the lower vacuum O-ring.
b) It should not be necessary to remove the electrostatic screen when changing
the tube.
9) Clean the lower and upper O-ring seal areas thoroughly: take care to remove any sharp
particles.
10) Inspect and if necessary replace the upper and lower O-ring seals
11) Inspect the new ICP tube for defects, especially chips or cracks at the vacuum sealing faces. Do
not install a damaged tube.
12) Install the tube.
13) Tighten the cooling clamps. Do not use excessive force. The lower clamp should be firm, and
the upper clamp should be much looser. This allows the electrostatic shield to move freely
upwards by thermal expansion. The electrostatic screen must not be bowed out too much.
Keep a clearance of at least 12 mm between the screen and the RF coil.
14) Reassemble the ICP 180 source
15) When the outer cover is in place, pump down and perform a leak check.
16) Perform an RF leakage test. See Appendix A of your Plasmalab system manual for details.
17) Dispose of the old tube in accordance with local regulations.
ICP 180 Source
Issue 4: January 06 Page 20 of 26 Printed: 18-Jan-06, 8:44
Equipment Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä=f`m=NUM=
WARNING
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Oxford Instruments Plasma Technology has global Customer Support Facilities to provide a co-
ordinated response to customer’s queries. All queries are recorded on our Support Database
and dealt with as quickly as possible. If we are not able to answer the query immediately, we
will contact you as soon as possible.
Before contacting a Customer Support Facility, please ensure that you have referred to the
appropriate section of your system manual, OEM manuals and electrical drawings.
Please direct all queries through your nearest support facility (see below) and have the
following details available.
System Type, e.g. mä~ëã~ä~ÄpóëíÉãNMM=etc.
Works Order No. – This can be found on the front cover of your system manual.
Contact Information – Your name, Company and how we can contact you.
Details of your query – nature of the problem, part numbers of spares required, etc.
You can contact us via any of the following:
China
Beijing
Tel: +86 106518 8160
Email:
pt.support@oichina.cn
Shanghai
Tel: +8621 6360 8530
Email:
pt.support@oichaina.cn
Germany
Tel: +49 6122 937 161
Email:
info@oxford.de
Japan
Tel: +81 3 5245 3591
Email:
oikkpt@oxinst.co.jp
Singapore
Tel: +65 6337 6848
Email: pt.support@oxford-instruments.com.sg
Taiwan
Tel: +886 3 5788696
Email:
pt.support@oxford-instruments.com.tw
UK
Customer Support Hotline: +44(0) 1934 837070
(0800 – 2000 UK local time)
Fax: +44(0) 1934 837071
Email:
pt.support@oxinst.co.uk
USA
Concord, MA
Tel: +1 978 9933 ext. 444
Toll Free: +1 800 447 4717 ext. 444
Fax: +1 978 369 8287
Email:
support.pt@ma.oxinst.com
ICP 180 Source
Printed: 18-Jan-06, 8:44 Page 21 of 26 Issue 4: January 06
mä~ëã~ä~Ä=f`m=NUM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== Equipment Manual=
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
=
WARNING
WHEN CARRYING OUT THE FOLLOWING PROCEDURES, CONTINUOUSLY MONITOR
THE RF EMISSIONS AS DETAILED IN APPENDIX A. ON COMPLETION OF ALL TESTS,
MEASURE THE RF EMISSIONS TO ENSURE THAT THEY ARE WITHIN SAFE LIMITS AS
SPECIFIED IN APPENDIX A.
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NOTE: The following text refers to systems fitted with an Automatch Unit manual
adjustment panel. For systems having software control of the Automatch Unit, refer
to Section 5 (Operating Instructions) of your system manual and the Automatch
Unit’s Equipment Manual.
If the indicated reflected power shown on the RF generator during processing is greater than 10% of the
indicated forward power it is necessary to carry out the following checks.
1) Check that the 24VDC supply to the automatch is present.
2) Check that the 24VDC fuse, located on the AMU main PCB, is OK.
3) If the capacitors have driven to their end stops or settled distant from a good match, set both
AUTO/MANUAL switches to MANUAL.
4) Operate the C1 MIN/MAX switch until the indicated reflected power reduces.
5) Operate the C2 MIN/MAX switch to further reduce the indicated reflected power.
6) Continue to operate both MIN/MAX switches until the minimum indicated reflected power is
obtained.
7) Set both AUTO/MANUAL switches to AUTO.
If it is not possible to obtain a reduction of indicated reflected power, check the mechanical drives to the
capacitors as follows:
1) Switch off the RF power.
2) Remove the automatch covers.
3) Set both AUTO/MANUAL switches to MANUAL.
4) Use the MIN/MAX switches to drive each capacitor to both of its end stops (approximately 15
turns of spindle rotation between end stops). While the spindles are rotating, look for
slipping of the capacitor shafts and for the mechanical coupling becoming disengaged. If
required, re-engage the coupling and tighten the coupling screws. Verify that the electrical
end stops limit capacitor adjustment within the mechanical alignment range. CARE:
Approach the mechanical limits slowly, turning by hand. Driving hard past a mechanical limit
can damage a capacitor.
NOTE:
Capacitor spindle rotation clockwise decreases capacitance viewed from the drive
motor side.
ICP 180 Source
Issue 4: January 06 Page 22 of 26 Printed: 18-Jan-06, 8:44