Utah-94-721002-System-Manual.pdf - 第219页

pÉêîáÅÉë=péÉÅáÑáÅ~íáçåë= Appendix S Qualitative Spec if ications for all of Oxford Instruments Plasma Technology’s Plasm a and Ion Beam Systems Issue 16: April 05 Page 1 of 22

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G/GAS/ROT/050 (Tube No: A125-3)
0
0
123456
10
20
30
40
50
60
Scale Reading
Flow
(sccm)
A125-
3
G/GAS/ROT/25L (Tube No: A250-4)
0
0
123456
5
10
15
20
25
30
Scale Reading
Flow
(slpm)
A
250-4
G/GAS/ROT/40L (Tube No: A250-6)
0
0
123456
10
20
30
40
50
Scale Reading
Flow
(slpm)
A250-
6
G/GAS/ROT/900 (Tube No: A250-1)
0
0
123456
1
2
3
4
5
Scale Reading
Flow
(slpm)
A
250-
1
G/GAS/ROT/800 (Tube No: A125-7)
0
0
123456
100
200
300
400
500
Scale Reading
Flow
(sccm)
A
125-7
600
700
800
900
Rotameter Data
Issue 1: August 03 Page 4 of 4 Printed: 2-Jul-05, 11:43
pÉêîáÅÉë=péÉÅáÑáÅ~íáçåë=
Appendix S Qualitative Specifications for all of Oxford
Instruments Plasma Technology’s Plasma and Ion
Beam Systems
Issue 16: April 05 Page 1 of 22
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CONTENTS
1.
Introduction.................................................................................................................3
2. Cooling / Warming water............................................................................................4
2.1 Recirculation water ............................................................................................................5
2.1.1 Mandatory Specifications for recirculated water systems .......................................6
2.2 Total Loss Cooling...............................................................................................................7
2.2.1 Mandatory Specifications for total loss cooling systems .........................................8
3. Electrical supply ..........................................................................................................9
3.1 System earthing and bonding...........................................................................................9
3.1.1 Earth connection.........................................................................................................9
3.1.2 Neutral supply bonding............................................................................................10
3.1.3 Residual Current Circuit Breakers............................................................................10
3.2 Mandatory Specifications for electrical installations.....................................................10
4. Compressed air..........................................................................................................11
4.1 Mandatory Specifications for compressed air supplies..................................................12
5. Nitrogen.....................................................................................................................13
5.1 Mandatory specifications for Nitrogen supplies............................................................13
6. Process gases.............................................................................................................14
6.1 Mandatory specifications for process gas supplies ........................................................14
6.1.1 Systems using Helium wafer cooling.......................................................................14
6.1.2 Installation of low vapour pressure gases (e.g. SiCl
4
, BCl
3
, C
4
F
8
)............................15
7. Liquid Nitrogen .........................................................................................................16
7.1 Mandatory Requirements for Liquid Nitrogen systems.................................................16
8. Extraction...................................................................................................................17
8.1 Mandatory requirements for Rotary Pump extraction..................................................17
8.2 Mandatory requirements for Gas Pod extraction..........................................................17
8.3 Mandatory requirements for Cryogenic pump extraction............................................18
9. Environment..............................................................................................................19
9.1 Mandatory Specifications for the system environment.................................................19
10. Change Record...........................................................................................................20
11. OIPT locations worldwide.........................................................................................22
Fig 2.1: Recommended basic recirculation installation..............................................................6
Fig 2.2: Recommended basic total loss installation....................................................................7
Fig 3.1: Recommended electrical installation.............................................................................9
Fig 4.1: Recommended compressed air supply installation.....................................................11
Fig 5.1: Recommended nitrogen supply installation................................................................13
Fig 6.1: Recommended process gas supply installation ...........................................................14
Services Specifications
Issue 16: April 05 Page 2 of 22 Printed: 6-Jan-06, 8:44