Utah-94-721002-System-Manual.pdf - 第269页
System Manual lñÑçêÇ=fåëí êìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== ^ää=lfmq=póëíÉãë NK= eÉ~äíÜ=~åÇ=p~ÑÉíó= For Health and Safety aspects of operating and maintaining th e Oxford Instruments Plasma Technology Automatch Unit, refer to …
^ää=lfmq=póëíÉãë lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
Contents
1.
Health and Safety........................................................................................................3
2. Description...................................................................................................................3
2.1 Introduction........................................................................................................................3
2.2 Major components .............................................................................................................4
2.2.1 Automatch control panel...........................................................................................4
2.3 Matching component layouts............................................................................................5
2.4 Sense and control PCB........................................................................................................7
3. Test and setting up......................................................................................................8
3.1 Overview.............................................................................................................................8
3.2 Procedure............................................................................................................................9
4. Operator adjustment ................................................................................................13
4.1 DC bias / Peak-to-peak switch setting.............................................................................13
5. Operation...................................................................................................................13
6. Troubleshooting........................................................................................................15
6.1 Fault diagnosis chart ........................................................................................................15
6.1.1 Amplifier gain adjustment.......................................................................................16
6.1.2 Drive motor shaft to capacitor spindle alignment.................................................17
6.2 Link Settings......................................................................................................................18
6.3 Changing the RF components .........................................................................................19
6.4 Adjustment of capacitor park positions..........................................................................20
7. OIPT locations worldwide.........................................................................................20
Fig 1: The Oxford Instruments Plasma Technology automatch unit.........................................3
Fig 2: Typical AMU control panel ................................................................................................4
Fig 3: Matching component layouts............................................................................................6
Fig 4: Sense and control PCB layout............................................................................................7
Fig 5: Capacitor shafts rotation direction .................................................................................10
Fig 6: Component locations .......................................................................................................11
Fig 7: LK102 and LK2 settings....................................................................................................16
OIPT Automatch Unit
Issue 6: February 05 Page 2 of 20 Printed: 5-Jan-06, 8:03
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== ^ää=lfmq=póëíÉãë
NK= eÉ~äíÜ=~åÇ=p~ÑÉíó=
For Health and Safety aspects of operating and maintaining the Oxford Instruments Plasma
Technology Automatch Unit, refer to Section 1 - Health and Safety of your mä~ëã~ä~Ä or
fçåÑ~Ä system manual.
OK= aÉëÅêáéíáçå=
OKN= fåíêçÇìÅíáçå=
The purpose of the Oxford Instruments Plasma Technology Automatch Unit (AMU) is to match
the impedance of mä~ëã~ä~Ä process chambers and fçåÑ~Ä RF ion sources to RF generators
with an output impedance of 50 ohms, operating at 13.56 MHz.
DC bias / Peak-
to-peak switch
Fig 1: The Oxford Instruments Plasma Technology automatch unit
Different versions of internal components exist, but all AMUs in this series share common
electronic controls and setting up instructions. The main versions are:
Low power: The two matching capacitors are air-cooled vane types.
High power: The two matching capacitors are water-cooled vacuum types.
The low power version is used for single wafer electrodes matching up to 500W. (The air vane
AMU is rated for 300W operation in all OIPT tools, and for use up to 500W in specific builds.)
The high power version is used in most other applications, including batch electrode
matching, 3kW ICP source, and 3cm and 15cm RF ion sources.
Note that OIPT also manufactures a 5kW AMU for use with the ICP 380 source and the 35cm
RF ion source. This AMU has an associated dedicated manual.
OIPT Automatch Unit
Printed: 5-Jan-06, 8:03 Page 3 of 20 Issue 6: February 05
^ää=lfmq=póëíÉãë lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
OKO= j~àçê=ÅçãéçåÉåíë=
The AMU comprises:
a) an input section with a type N coaxial connector, and a coupler giving ‘out of match’
error signals when the reflected power is greater than 1% of the forward power.
b) an RF section containing two motor-driven variable capacitors, together with a coil
where necessary.
c) a DC bias / Peak to peak, set by local switch, signal path. (Only fitted to AMUs used
for matching to a powered wafer table.)
d) an electronic control board, which uses the error signals to drive the variable
capacitors towards match.
e) a manual drive panel with capacitor position readings, for manual adjustments.
OKOKN= ^ìíçã~íÅÜ=Åçåíêçä=é~åÉä=
A manual adjustment panel, shown in Fig 2 , is located behind a flap in the front of the
equipment rack. It comprises:
Auto / Manual switch: Sets the operating mode of the RF matching unit.
C1 MAX / MIN: Manual adjustment of RF matching capacitor C1. (Rotating its shaft
clockwise or counter clockwise.)
C2 MAX / MIN: Manual adjustment of RF matching capacitor C2. (Rotating its shaft
clockwise or counter clockwise.)
C1 PARK: Park position potentiometer for C1.
C2 PARK: Park position potentiometer for C2.
RF Interlock ON/OFF: Disables the RF interlock. RF generators deliver no power if the
interlock is off.
Capacitor positions for C1 and C2 are displayed as numbers from 000 (minimum) to 999
(maximum).
AUTO
AUTO
MANUAL
MANUAL
C1 MAX
C1 MAX
C1 MIN
C1 MIN
C2 MAX
C2 MAX
C2 MIN
C2 MIN
C1 PARK
C1 PARK
C2 PARK
C2 PARK
ON
OFF
RF
Interlock
C1
C2
1
2
3
4
5
6
DISPLAY SELECTOR
Fig 2: Typical AMU control panel
OIPT Automatch Unit
Issue 6: February 05 Page 4 of 20 Printed: 5-Jan-06, 8:03