Utah-94-721002-System-Manual.pdf - 第255页
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d) Follow the procedure in Section 7 (Troubleshooting) for improving the quality of the
match.
e) Vary the pressure across the 1 to 5 Pa range.
It is usually possible to start the plasma directly at process conditions of interest. However, it is difficult to
sustain a plasma at low RF power (<300W).
ICP 180 Source
Issue 4: January 06 Page 14 of 26 Printed: 18-Jan-06, 8:44
Equipment Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä=f`m=NUM=
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
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The maintenance required to ensure continued safety and reliability is listed in the following
Maintenance Schedule.
The periodicity is indicated by an asterisk (
*) in the appropriate column.
Task
As
Required
Weekly
Three-
Monthly
Notes
Measure RF emissions
*
See Appendix A of the System 100
manual for details. RF should also be
measured after any maintenance
involving the removal of covers and
monitored continuously if the
system is operated with RF power
applied and any covers removed.
Inspect Quartz
components
*
See sub-section 6.2.1. Periodicity may
need to be reduced depending on
process conditions.
Inspect Alumina
components
*
See sub-section 6.2.1. Periodicity may
need to be reduced depending on
process conditions.
ICP dielectric tube
cleaning
*
See sub-section 6.3.1. Periodicity depends
on process condition.
Vacuum check
*
See sub-section 6.3.2.
Water cooling circuit
*
See sub-section 6.3.3.
RF enclosure exhaust
flow
*
See sub-section 6.3.3.
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Downstream microwave, ECR and induction coupled plasma sources contain quartz or alumina tubes or
windows under vacuum, which may be subject to attack by the plasma process. If these components fail
whilst under vacuum, an implosion can occur. This should not present a safety hazard, provided the
equipment is used with all covers and screens in place, but may cause damage to system components.
Failure by implosion becomes more likely as the components age, therefore they should be regarded as
consumable items. A programme of regular inspection and renewal of these components is necessary to
minimise the risk of implosion.
ICP 180 Source
Printed: 18-Jan-06, 8:44 Page 15 of 26 Issue 4: January 06
mä~ëã~ä~Ä=f`m=NUM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== Equipment Manual=
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
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WARNING
DISCARDED COMPONENTS MAY BE CONTAMINATED WITH RESIDUES FROM THE
PLASMA PROCESS AND MAY BE ACIDIC OR TOXIC. DISPOSE WITH REGARD TO
LOCAL PRACTICES.
IMPORTANT: The following inspection intervals should be reduced if the source is operated
for prolonged periods at high powers, especially for quartz components
operating in fluorine-containing plasmas.
Quartz components
The internal surfaces of these components should be inspected at intervals of three months or less.
Components showing significant signs of wear should be discarded and replaced by a new component.
See ‘Tube wall thickness’ below.
Alumina components
The internal surfaces of these components should be inspected at intervals of six months or less.
Components showing significant signs of wear should be discarded and replaced by a new component.
See ‘Tube wall thickness’ below.
Tube wall thickness
The nominal minimum wall thickness of a new tube is 6 mm. During an inspection, if the wall thickness is
reduced to 4 mm or less at any point then the tube must be replaced by a new component. To change the
tube, refer to sub-section 6.4. page 19.
ICP 180 Source
Issue 4: January 06 Page 16 of 26 Printed: 18-Jan-06, 8:44