Utah-94-721002-System-Manual.pdf - 第288页
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã ~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Issue 2: November 02 `çåíÉåíë= Contents .................................................................................…
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Modular Cluster System – ICP 180=
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Issue 2: November 2002
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02
`çåíÉåíë=
Contents............................................................................................................................................................ ii
Introduction.....................................................................................................................................................
iii
Location of major components........................................................................................................................
v
Section 0 System common components.......................................................................................................
0-1
Section 1 Intentionally left blank
Section 2 Intentionally left blank
Section 3 Process chambers...........................................................................................................................
3-1
Section 4 Intentionally left blank
Section 5 Lower electrode.............................................................................................................................
5-1
Section 6 RF plasma generation, power supplies........................................................................................
6-1
Section 7 Vacuum measurement...................................................................................................................
7-1
Section 8 Pumping pipework ........................................................................................................................
8-1
Section 9 Process gas handling.....................................................................................................................
9-1
Section 10 Wafer handling options, load locks and robotics ...................................................................
10-1
Section 11 Spares .........................................................................................................................................
11-1
Section 12 Accessories.................................................................................................................................
12-1
Page ii of vi
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02
fåíêçÇìÅíáçå=
This Illustrated Parts Catalogue has been prepared to enable the rapid identification of components of the Oxford
Instruments Plasma Technology mä~ëã~ä~Ä póëíÉã=NMM (ICP 180) machine.
The catalogue is not a comprehensive list of all machine components, for details of components not included,
please contact Oxford Instruments Plasma Technology (OIPT).
Contact your local OIPT representative for prices; see the last page of this catalogue for addresses, phone/fax
numbers and e-mail addresses.
Catalogue organisation
This catalogue is organised to mimic the OIPT Bill Of Materials and Price List numbering system for ease of
component location. Each major system component is identified by a number of the form AAA-BB-CC:
AAA: 100 represents the mä~ëã~ä~Ä póëíÉã=NMM product.
BB: System sections as follows (note that not all available numbers are used) :
0: Compulsory elements of the basic system, such as frame, power box, Programmable Logic
Controllers etc.
1: Not applicable to the mä~ëã~ä~Ä póëíÉã=NMM
2: Not applicable to the mä~ëã~ä~Ä=póëíÉã=NMM
3: Process chambers and their options.
4: Not applicable to the mä~ëã~ä~Ä póëíÉã=NMM
5: Lower electrode
6: Plasma generation, power supplies.
7: Vacuum measurement.
8: Pumping pipework.
9: Process gas lines
10: Wafer handling options, load locks and robotics
11: Spare series
12: Accessories, cover plates, chillers, end point detectors etc.
The sections in this catalogue are numbered to match these system sections. So for example, if you are
looking for a process chamber component, you will find it in Section 3.
CC: Sub assembly numbering.
Printed: 16-Jan-06, 15:55
Page iii of vi