Utah-94-721002-System-Manual.pdf - 第358页

mä~ëã~ä~Ä póëíÉã=NMM== lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`mNUMF= Accessories Issue 2: November 02 NOKN= eÉ~íÉêëLÅÜáääÉêë= Heater chiller various options OIPT Part No. Description 81-12-1…

mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=

Illustrated Parts Catalogue

Ef`m=NUMF=

Issue 2: November 02 Accessories

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Section 12 - Accessories....................................................................................................................................1

12.1 Heaters/chillers.....................................................................................................................................................2

12.2 Heater/chiller option spares ................................................................................................................................2

12.3 End point detectors..............................................................................................................................................3

12.3.1 Verity EP200 end point kit (100-12-72/01) .........................................................................................3

12.3.2 Verity EP200 optional spares..............................................................................................................3

12.3.3 Sofie integrated laser end point kit (81-12-86) .................................................................................4

12.3.4 Sofie integrated laser optional spares ...............................................................................................4

Printed: 16-Jan-06, 15:55

Section 12 Page 1 of 6

mä~ëã~ä~Ä póëíÉã=NMM== lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=

Illustrated Parts Catalogue

Ef`mNUMF=

Accessories Issue 2: November 02

NOKN= eÉ~íÉêëLÅÜáääÉêë=

Heater chiller various options

OIPT Part No. Description

81-12-18 CU500 HEATER CHILLER 240V 50Hz

81-12-18/1 CU500 HEATER CHILLER 208V 60Hz

81-12-19 CU500 DIGITAL HEATER/CHILLER 240V 50Hz

81-12-19/1 CU500 DIGITAL HEATER/CHILLER 208V 60Hz

81-3-18/1 CU500 HEATER CHILLER 208V 60Hz

G/WTR/SUN/520 CU500 818S DIGITAL + FILTER KIT 240V 50Hz

G/WTR/SUN/521 CU500 818S DIGITAL + FILTER KIT 208V 60Hz

G/WTR/SUN/550 CU500 HEATER/CHILLER (+ACU006)

G/WTR/SUN/551 CU500 FAN MOTOR PT. No. 500-5

NOKO= eÉ~íÉêLÅÜáääÉê=çéíáçå=ëé~êÉë=

OIPT Part No. Qty Description

G/WTR/SUN/502 1 PUMP HEAD FOR CU500

G/WTR/SUN/503 1 PUMP MOTOR FOR CU500

G/WTR/SUN/007 CORROSION INHIBITOR 3 x 5 LTR PACK

G/VAC/OIL/905 1 VAC GREASE SILICONE

G/WTR/SUN/801 1 WATER FILTER UNIT MCY4463EG

Section 12 Page 2 of 6

Printed: 16-Jan-06, 15:55

mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=

Illustrated Parts Catalogue

Ef`m=NUMF=

Issue 2: November 02 Accessories

NOKP= båÇ=éçáåí=ÇÉíÉÅíçêë==

NOKPKN= sÉêáíó=bmOMM=ÉåÇ=éçáåí=âáí=ENMMJNOJTOLMNF=

Item Part No. Description

1 CHAMBER

2 MA90D13116 CENTRING RING

3 G/FIXS32625 M6 x 25 mm S/S CAPHEAD SCREW

4 G/SUN/END/021 VERITY EP200SCR ADAPTOR

5 G/SUN/END/023 VERITY SL-UV10 FIBRE OPTIC 1M

6 MD91D17811 END POINT ADAPTOR RING

7 MD91C17809 END POINT ADAPTOR FLANGE (EP200)

8 M/4078D/01 WINDOW GLASS (6 mm QUARTZ)

9 M/4175D/01 WINDOW GASKET

G/SUN/END/022 VERITY LC10 LIGHT COUPLER (LOCATED IN ADAPTOR -

ITEM 5)

G/SUN/END/020 VERITY EP200MD 200 mm MON/DET (LOCATED ON FRONT

PANEL - ABOVE RF GENERATOR)

NOKPKO= sÉêáíó=bmOMM=çéíáçå~ä=ëé~êÉë==

OIPT Part No. Qty Description

MA90D13116 1 CENTRING RING

M/4175D/01 1 WINDOW GASKET

M/4078D/01 1 WINDOW GLASS (6 mm QUARTZ)

Printed: 16-Jan-06, 15:55

Section 12 Page 3 of 6