Utah-94-721002-System-Manual.pdf - 第242页
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ICP 180 Inductively Coupled Plasma Source
ICP 180 source fitted to a Plasmalab System 100
Issue 4: January 06 Page 1 of 26
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Contents
1. Health and Safety.............................................................................................................................3
2. Services .............................................................................................................................................4
2.1 Qualitative requirements..........................................................................................................................4
2.2 Quantitative requirements .......................................................................................................................4
2.2.1 Cooling water.....................................................................................................................................4
2.2.2 Process gas..........................................................................................................................................4
2.2.3 RF power.............................................................................................................................................4
2.2.4 Electrical supply..................................................................................................................................4
2.2.5 Extraction ...........................................................................................................................................4
3. Description........................................................................................................................................5
3.1 Function......................................................................................................................................................5
3.2 Mechanical assembly.................................................................................................................................7
3.3 Source specification...................................................................................................................................8
3.4 Graphs of typical operating characteristics .............................................................................................9
4. Installation......................................................................................................................................11
5. Operating Instructions...................................................................................................................12
5.1 Introduction.............................................................................................................................................12
5.1.1 Manual adjustment of the Automatch Unit..................................................................................12
5.1.2 Obtaining a Plasma..........................................................................................................................13
6. Maintenance...................................................................................................................................15
6.1 Maintenance schedule ............................................................................................................................15
6.2 Safety maintenance.................................................................................................................................15
6.2.1 Inspection and renewal...................................................................................................................16
6.3 Routine maintenance..............................................................................................................................17
6.3.1 As required.......................................................................................................................................17
6.3.2 Weekly..............................................................................................................................................18
6.3.3 3-Monthly.........................................................................................................................................18
6.4 Changing the ICP180 dielectric tube......................................................................................................19
7. Troubleshooting.............................................................................................................................21
7.1 Customer Support Facilities ....................................................................................................................21
7.2 High reflected power initial checks........................................................................................................22
7.3 High reflected power (system under vacuum) ......................................................................................23
7.3.1 Automatch gives reflected power > 5% ........................................................................................23
7.3.2 Automatch gives reflected power of 2% to 5%............................................................................24
OIPT locations worldwide ..................................................................................................................26
Fig 1: ICP 180 source - cross section of principal components.............................................................................5
Fig 2: ICP 180 Exploded view.................................................................................................................................7
Fig 3: Ion current density at the wafer versus ICP power....................................................................................9
Fig 4: Operating window.....................................................................................................................................10
Fig 5: Typical AMU control panel........................................................................................................................12
Fig 6: Automatch components ............................................................................................................................25
ICP 180 Source
Issue 4: January 06 Page 2 of 26 Printed: 18-Jan-06, 8:44
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For Health and Safety aspects of operating and maintaining the ICP 180 source, refer to Section 1 - Health
and Safety of the mä~ëã~ä~ÄpóëíÉãNMM=manual.
ICP 180 Source
Printed: 18-Jan-06, 8:44 Page 3 of 26 Issue 3 : December 00