Utah-94-721002-System-Manual.pdf - 第290页

mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã ~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Issue 2: November 02 Using the Parts Lists In this catalogue ‘item number’ refers to the reference number used on an illu…

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mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02
fåíêçÇìÅíáçå=
This Illustrated Parts Catalogue has been prepared to enable the rapid identification of components of the Oxford
Instruments Plasma Technology mä~ëã~ä~Ä póëíÉã=NMM (ICP 180) machine.
The catalogue is not a comprehensive list of all machine components, for details of components not included,
please contact Oxford Instruments Plasma Technology (OIPT).
Contact your local OIPT representative for prices; see the last page of this catalogue for addresses, phone/fax
numbers and e-mail addresses.
Catalogue organisation
This catalogue is organised to mimic the OIPT Bill Of Materials and Price List numbering system for ease of
component location. Each major system component is identified by a number of the form AAA-BB-CC:
AAA: 100 represents the mä~ëã~ä~Ä póëíÉã=NMM product.
BB: System sections as follows (note that not all available numbers are used) :
0: Compulsory elements of the basic system, such as frame, power box, Programmable Logic
Controllers etc.
1: Not applicable to the mä~ëã~ä~Ä póëíÉã=NMM
2: Not applicable to the mä~ëã~ä~Ä=póëíÉã=NMM
3: Process chambers and their options.
4: Not applicable to the mä~ëã~ä~Ä póëíÉã=NMM
5: Lower electrode
6: Plasma generation, power supplies.
7: Vacuum measurement.
8: Pumping pipework.
9: Process gas lines
10: Wafer handling options, load locks and robotics
11: Spare series
12: Accessories, cover plates, chillers, end point detectors etc.
The sections in this catalogue are numbered to match these system sections. So for example, if you are
looking for a process chamber component, you will find it in Section 3.
CC: Sub assembly numbering.
Printed: 16-Jan-06, 15:55
Page iii of vi
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02
Using the Parts Lists
In this catalogue ‘item number’ refers to the reference number used on an illustration, ‘part number’ refers to the
unique number used to identify the part in Oxford Instruments Plasma Technology’.
To identify a part:
1) Locate the appropriate section from the contents list.
2) Find the required component on the relevant illustration and note its item number (see note (d) below).
4) Refer to the associated parts list table and find the item number.
5) Note the OPT part number and description.
6) Telephone or fax the part number and description to your local OIPT sales office or representative who
can quickly locate the part on the spares database. See the last page of this catalogue for OIPT locations
world-wide.
NOTES:
(a) Where possible, the item number used in the illustrations is the same as that quoted on the OIPT Bill of
Materials for the assembly. However, in some cases this has not been possible as more than one assembly
may be shown in an illustration.
(b) Where an item number has more than one part associated with it in a parts list table, this indicates
component options which may vary according to the configuration of the machine: identify the
component from the actual machine before selecting the correct option.
(c) Items listed without item numbers in the parts list tables are not shown in the illustrations, but their OIPT
Part Numbers and descriptions are listed to enable identification.
(d) Printed Circuit Boards (PCBs) illustrated within this catalogue are assembled boards which include all
integrated circuits and other components. To ensure the correct assembled board is supplied, read the PC
number stamped on the PCB. This will read PC100xxxxxx. Check this with the OIPT spares department or
include the number with your order, making sure to include any revision number printed on the circuit
board.
Page iv of vi
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02
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FRONT VIEW
Capacitance manomete
r
(see Section 7)
Process Chambe
r
(see Section 3)
V
acuum capacitance AMU
(see Sub section 6.2)
Wafer handling
(see Section 10)
Control panel
(see Sub-section 0.2)
A
MU controlle
r
(see Sub section 6.3)
V
acuum capacitor AMU
(see Sub section 6.1)
V
AT APC controlle
r
(see Sub section 8.2)
Turbo pump controlle
r
(
see Sub section 8.2
)
RFG3001 RF generator
(see Sub section 6.4)
Pump down pipe heate
r
(see Sub section 0.8)
RFX600A RF generator (inside)
(see Sub section 6.4)
Printed: 16-Jan-06, 15:55
Page v of vi