Utah-94-721002-System-Manual.pdf - 第122页
mä~ëã~ä~Ä póëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual WARNING BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY . SKO= dÉåÉê~ä= WARNINGS A) BEFORE STARTING ANY MAINTENANCE…
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
SKN= `ìëíçãÉê=ëìééçêí=Ñ~ÅáäáíáÉë=
Oxford Instruments Plasma Technology has global Customer Support Facilities to provide a co-
ordinated response to customer’s queries. All queries are recorded on our Support Database
and dealt with as quickly as possible. If we are not able to answer the query immediately, we
will contact you as soon as possible.
Before contacting a Customer Support Facility, please ensure that you have referred to the
appropriate section of your system manual, OEM manuals and electrical drawings.
Please direct all queries through your nearest support facility (see below) and have the
following details available.
System Type, e.g. mä~ëã~ä~ÄpóëíÉãNMM=etc.
Works Order No. – This can be found on the front cover of your system manual.
Contact Information – Your name, Company and how we can contact you.
Details of your query – nature of the problem, part numbers of spares required, etc.
You can contact us via any of the following:
China
Beijing
Tel: +86 106518 8160
Email:
pt.support@oichina.cn
Shanghai
Tel: +8621 6360 8530
Email:
pt.support@oichaina.cn
Germany
Tel: +49 6122 937 161
Email:
info@oxford.de
Japan
Tel: +81 3 5245 3591
Email:
oikkpt@oxinst.co.jp
Singapore
Tel: +65 6337 6848
Email: pt.support@oxford-
instruments.com.sg
Taiwan
Tel: +886 3 5788696
Email:
pt.support@oxford-instruments.com.tw
UK
Customer Support Hotline: +44(0) 1934 837070
(0800 – 2000 UK local time)
Fax: +44(0) 1934 837071
Email:
pt.support@oxinst.co.uk
USA
Concord, MA
Tel: +1 978 9933 ext. 444
Toll Free: +1 800 447 4717 ext. 444
Fax: +1 978 369 8287
Email:
support.pt@ma.oxinst.com
Maintenance
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mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
SKO= dÉåÉê~ä=
WARNINGS
A) BEFORE STARTING ANY MAINTENANCE WORK, SWITCH OFF AND LOCK OFF THE
WALL-MOUNTED SAFETY ISOLATION BOX.
B) ENSURE THAT ONLY FULLY AND APPROPRIATELY QUALIFIED PERSONNEL ARE
ALLOWED TO WORK ON THE SYSTEM.
C) READ SECTION 1 - HEALTH AND SAFETY AT THE BEGINNING OF THIS MANUAL.
WARNING
ISOPROPYL ALCOHOL IS HIGHLY INFLAMMABLE (FLAMMABLE). DO NOT USE IT
NEAR A NAKED FLAME OR ENERGISED ELECTRICAL EQUIPMENT.
CAUTION
When changing or topping up oil in a pump, always use oil of the same brand
and type.
Always replace filters with those of a similar type and brand.
Maintenance
UC Davis 94-721001 Issue 1: March 06 Page 6-4 of 22 Printed: 22-Mar-06, 7:41
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
SKP= p~ÑÉíó=ã~áåíÉå~åÅÉ=
Induction coupled plasma sources contain quartz or alumina tubes or windows under vacuum,
which may be subject to attack by the plasma process. If these components fail whilst under
vacuum, an implosion can occur. This should not present a safety hazard, provided the
equipment is used with all covers and screens in place, but may cause damage to system
components.
Failure by implosion becomes more likely as the components age, therefore they should be
regarded as consumable items. A programme of regular inspection and renewal of these
components is necessary to minimise the risk of implosion.
SKPKN= fåëéÉÅíáçå=~åÇ=êÉåÉï~ä=
WARNING
DISCARDED COMPONENTS MAY BE CONTAMINATED WITH RESIDUES FROM THE
PLASMA PROCESS AND MAY BE ACIDIC OR TOXIC. DISPOSE WITH REGARD TO
LOCAL PRACTICES.
IMPORTANT: The following inspection intervals should be reduced if the source is
operated for prolonged periods at high powers, especially for quartz
components operating in fluorine-containing plasmas.
SKPKNKN= nì~êíò=ÅçãéçåÉåíë=
The internal surfaces of these components should be inspected at intervals of three months or
less. Components showing significant signs of wear should be discarded and replaced by a
new component. For details of changing the ICP 180 dielectric tube, refer to the ICP 180
Equipment Manual Section 6 (Maintenance).
SKPKNKO= ^äìãáå~=ÅçãéçåÉåíë=
The internal surfaces of these components should be inspected at intervals of six months or
less. Components showing significant signs of wear should be discarded and replaced by a
new component. For details of changing the ICP 180 dielectric tube, refer to the ICP 180
Equipment Manual Section 6 (Maintenance).
Maintenance
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