Utah-94-721002-System-Manual.pdf - 第130页
mä~ëã~ä~Ä póëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual WARNING BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY . SKU= VQJNMMJSJRMMLOMMs=ofb=RMMt=oc= ÖÉåÉê~íçê=L=lfmq=^jr=…
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
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WARNING
BEFORE ATTEMPTING ANY MAINTENANCE WORK ON THE PROCESS CHAMBER, IT
MUST BE SUBJECTED TO AT LEAST TWO VENT CYCLES SUBSEQUENT TO A
PROCESSING RUN.
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1) Visually examine the substrate table for contamination. Any necessary cleaning
should be carried out using a lint-free cloth soaked in Isopropyl Alcohol (IPA).
WARNING
ISOPROPYL ALCOHOL IS HIGHLY INFLAMMABLE (FLAMMABLE). DO NOT USE IT
NEAR A NAKED FLAME OR ENERGISED ELECTRICAL EQUIPMENT.
Examine the table and its integral heating and/or cooling systems for signs of damage.
Maintenance
Printed: 22-Mar-06, 7:41 Page 6-11 of 22 UC Davis 94-721001 Issue 1: March 06
mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
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Ensure that the RF/microwave radiation leakage tests, detailed in Appendix A are carried out.
For details of maintenance required, refer to the manufacturer’s literature in Volume 3 of this
manual.
Maintenance
UC Davis 94-721001 Issue 1: March 06 Page 6-12 of 22 Printed: 22-Mar-06, 7:41
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
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Refer to the manufacturer’s literature in Volume 3 for details of the following maintenance:
a) Atmosphere and vacuum adjustment.
b) Filter cleaning.
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1) Remove the capacitance manometer from the process chamber.
WARNING
ISOPROPYL ALCOHOL IS HIGHLY INFLAMMABLE (FLAMMABLE). DO NOT USE IT
NEAR A NAKED FLAME OR ENERGISED ELECTRICAL EQUIPMENT.
Carefully pour a measure of Isopropyl Alcohol (IPA) at room temperature into the
pressure-measurement cavity. Do not allow IPA to come into contact with electronic
components.
Agitate the solvent carefully and then pour it out.
CAUTION
Because the diaphragm in the gauge is thin tensioned metal, it can be destroyed
by sudden changes in temperature or by clumsy handling.
Re-install the gauge, allowing sufficient time for outgassing of the cavity and diaphragm
prior to operation.
NOTE: Refer to the manufacturer’s manual for calibration adjustments.
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The following applies to an Edwards Active Inverted Magnetron gauge. If a different Penning
gauge is fitted, refer to the manufacturer's literature.
Maintenance
Printed: 22-Mar-06, 7:41 Page 6-13 of 22 UC Davis 94-721001 Issue 1: March 06