Utah-94-721002-System-Manual.pdf - 第119页

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~ =qÉÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉãNMM WARNING BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY . SK= j~áåíÉå~åÅÉ= 6. Maintenance ........................…

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mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
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While PC 2000 is running, two log files are maintained, one for the system log and the other
for the data log. These files are stored on your hard disk in the folder C:\Optsyslg. Details of
the log files are as follows.
System log file – The filename for this file is of the form s0Caabb where aa represents the
month, e.g. 06 (for June) and bb represents the day of the month, e.g. 11 (for the eleventh
day).
Data log file – The filename for this file is of the form p1caabb where aa represents the
month, e.g. 06 (for June) and bb represents the day of the month, e.g. 11 (for the eleventh
day).
When PC 2000 is shut down correctly (select the System menu, then the Exit option), both log
files are automatically saved and closed. If PC 2000 is then started again, the files are
automatically opened and their data is available via the System Log page and the Select Log
Data page.
If PC 2000 is not shut down correctly, e.g. the PC is switched off or the PC ‘hangs’ etc., one or
both of the log files can become corrupted. If this happens, the next time PC 2000 is started
the corrupt log file(s) will be detected and reported on-screen by an error dialogue. To
correct this problem, use the following procedure:
1) Close PC 2000.
2) Use Windows Explorer to navigate to C:\Optsyslg.
3) Delete the reported log file.
4) Re-start PC 2000.
Operating Instructions
UC Davis 94-721001 Issue 1: March 06 Page 5-52 of 52 Printed: 22-Mar-06, 10:42
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
SK= j~áåíÉå~åÅÉ=
6.
Maintenance ............................................................................................................6-1
6.1 Customer support facilities.............................................................................................6-3
6.2 General.............................................................................................................................6-4
6.3 Safety maintenance ........................................................................................................6-5
6.3.1 Inspection and renewal...........................................................................................6-5
6.3.1.1 Quartz components.........................................................................................6-5
6.3.1.2 Alumina components.......................................................................................6-5
6.4 94-100-BW-2F Base wired 2-frame kit ...........................................................................6-6
6.4.1 Weekly......................................................................................................................6-6
6.4.2 Monthly....................................................................................................................6-6
6.4.3 Three-Monthly.........................................................................................................6-7
6.4.4 Annually...................................................................................................................6-7
6.4.5 Changing the gas bottles........................................................................................6-7
6.4.6 Etch cleaning............................................................................................................6-7
6.5 94-100-3-41C ICP 180 chamber kit with gate valve ......................................................6-9
6.5.1 Monthly....................................................................................................................6-9
6.5.2 O-rings......................................................................................................................6-9
6.6 Top electrode.................................................................................................................6-10
6.6.1 Monthly..................................................................................................................6-10
6.6.2 Six-monthly (tools with a removable showerhead)............................................6-10
6.6.3 Annually (tools having access to the gas inlet isolation assembly from the top
side only)................................................................................................................6-10
6.7 94-100-5-12A Cryo He lower electrode........................................................................6-11
6.7.1 Monthly..................................................................................................................6-11
6.8 94-100-6-500/200V RIE 500W RF generator / OIPT AMU kit.......................................6-12
6.8.1 Three-monthly .......................................................................................................6-12
6.9 Vacuum system..............................................................................................................6-13
6.9.1 Active Pirani gauge ...............................................................................................6-13
6.9.2 Capacitance manometer.......................................................................................6-13
6.9.2.1 Six-monthly (or as necessary)........................................................................6-13
6.9.3 Penning gauge.......................................................................................................6-13
6.9.3.1 Dismantling the body tube ...........................................................................6-14
6.9.3.2 Cleaning..........................................................................................................6-15
6.9.4 Turbomolecular pumps.........................................................................................6-15
6.9.4.1 Daily................................................................................................................6-15
6.9.4.2 Re-greasing of turbo pumps fitted to process chambers............................6-15
6.9.4.3 2000 to 8000 hours (3 to 12 months): pump relubrication.........................6-15
6.9.4.4 Alcatel turbo pumps fitted with bake-out collars.......................................6-16
6.9.5 Rotary vane pumps................................................................................................6-16
6.10 Gas handling system......................................................................................................6-17
6.10.1 Wall-mounted gas pod..........................................................................................6-17
6.10.1.1 Annually .........................................................................................................6-17
6.10.2 Mass flow controllers ............................................................................................6-17
6.10.2.1 Annually (or as necessary).............................................................................6-17
6.10.3 Filters......................................................................................................................6-17
6.10.3.1 Annually (or as necessary).............................................................................6-17
6.11 Pump lubricants.............................................................................................................6-18
Maintenance
Printed: 22-Mar-06, 7:41 Page 6-1 of 22 UC Davis 94-721001 Issue 1: March 06
mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
6.11.1 General.................................................................................................................. 6-18
6.11.2 Perfluorised polyethers ........................................................................................ 6-18
6.11.3 Hydrocarbon lubricants........................................................................................ 6-19
6.12 94-100-5-12A Cryo / heated -150 / 400C He lower electrode wafer clamping
plate changeover procedure ....................................................................................... 6-19
6.13 Adjusting the lower electrode wafer clamp clamping force .................................... 6-21
6.14 Automatic load lock end effector adjustments for different wafer sizes................ 6-22
Fig 6.1: 94-100-5-12A Cryo / heated -150 / 400C He lower electrode ................................. 6-20
Fig 6.2: Clamping force adjustment ...................................................................................... 6-21
Fig 6.3: End effector wafer size adjustments........................................................................ 6-22
Maintenance
UC Davis 94-721001 Issue 1: March 06 Page 6-2 of 22 Printed: 22-Mar-06, 7:41