Utah-94-721002-System-Manual.pdf - 第345页
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Issue 2: November 02 Gas Handling VKS= `äÉ~å=Ö~ë=äáåÉ=ïáíÜ =êçí~ãÉíÉê=EUNJVJMTF= 1 PROC ESS GAS OUT T O SYSTEM CLEAN G AS …
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Gas Handling Issue 2: November 02
VKR= `äÉ~å=Ö~ë=äáåÉ=ïáíÜ=jc`=EUNJVJPNF=
CLEAN GAS
INLET VALVE
(PNEUMATICALLY
CONTROLLED
SHUT-OFF)
PROCESS GAS
OUTLET VALVE
(PNEUMATICALLY
CONTROLLED
SHUT-OFF)
1
2
Item No. in
Illustration
Part Number Description
MA81C15916 CLEAN GAS LINE (MFC CONTROLLED) (all welded
pipework including valves but excluding MFC and
MFC cable)
G/GAS/FIT/614C 1/4 GASKET. RETAIN SS4VCR2GR (USED IN ALL VCR
FITTINGS)
1 * MASS FLOW CONTROLLER
2 MA00Z21746 MKS MASS FLOW CABLE ASSY
* Mass Flow Controllers are not supplied with the gas line, they vary in type according to each
customer's requirement. Please quote the part number on the unit if spares are required.
Section 9 Page 8 of 10
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Gas Handling
VKS= `äÉ~å=Ö~ë=äáåÉ=ïáíÜ=êçí~ãÉíÉê=EUNJVJMTF=
1
PROCESS GAS
OUT TO SYSTEM
CLEAN GAS
SHUT-OFF VALVE
(PNEUMATICALLY
OPERATED)
PROCESS GAS
SHUT-OFF VALVE
(PNEUMATICALLY
OPERATED)
CLEAN GAS IN
LINE
ROTAMETER
2
Item No. in
Illustration
Part Number Description
MA81B15081 CLEAN GAS LINE (ROTAMETER) (all welded
pipework including valves but excluding
rotameter)
G/GAS/FIT/614C 1/4 GASKET. RETAIN SS4VCR2GR (USED IN ALL VCR
FITTINGS)
1 G/GAS/ROT/800 ROTAMETER 800 CCM F65-SAHR3-A125-7SS
2 MA81D14784 INLET PIPE (ROTAMETER)
Printed: 16-Jan-06, 15:55
Section 9 Page 9 of 10
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Gas Handling Issue 2: November 02
VKT= d~ë=Ü~åÇäáåÖ=çéíáçå=ëé~êÉë=
OIPT Part No. Qty Description
81-9-51 - Externally mounted gas pod for up to six MFC lines + one rotameter or
MFC control line
MA81Z16003 1 GAS POD CHAMBER A or B PCB
G/AIR/VLV/506 1 6 WAY SMC ASSEMBLY SPASBR06
ESZ9102 1 DOOR INTERLOCK MICRO-SW SPDT
G/AIR/VLV/501 1 SINGLE SMC ASSEMBLY SPASBR01
G/GAS/FIT/614 1 ¼ RETAINING GASKET
81-9-11 1 Non-toxic gas line excluding mass flow controller
G/GAS/FIT/614 10 ¼ RETAINING GASKET
81-9-21 1 Toxic gas line with MFC bypass, excluding mass flow
controller
G/GAS/FIT/614 10 ¼ RETAINING GASKET
=
Section 9 Page 10 of 10
Printed: 16-Jan-06, 15:55